Differentially pumped quadrupole SIMS probe on FIB‐based and two‐beam microscopes

Chater, Richard J.; Shollock, Barbara A.; McPhail, David S.; Smith, Alan J.; Cooke, G. A.

doi:10.1002/sia.5665

Cited by 4 publications

(2 citation statements)

References 4 publications

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“…A single beam gallium ion microscope, FEI FIB200 workstation 11 with a quadrupole-based SIMS detector has been fitted with a second SIMS detector, a Hiden EQS 1000, 12 which is also quadrupole-based but is separately and differentially pumped. 9 The relative orientation of the detectors is shown in Fig. 1 with respect to the impact point of the primary ion beam on the sample target.…”

Section: Instrument Configurationmentioning

confidence: 99%

Simultaneous detection of positive and negative secondary ions

Chater

Smith

Cooke

2016

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

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A secondary ion mass spectrometer (SIMS) instrument is described that is configured with two SIMSdetectors that are both low-field extraction, quadrupole-based filters. Secondary ions are generated by sputtering with a liquid-metal ion gallium source and column of the type that is common on two-beam electron microscopes. The gallium ion beam, or focused ion beam achieves sub-100 nm focus with a continuous current of up to 300 pA. Positive secondary ions are detected by one SIMSdetector, and simultaneously, negative secondary ions are detected by the second SIMSdetector. The SIMSdetectors are independently controlled for recording mass spectra, concentration depth profiles, and secondary ion images. Examples of simultaneous positive and negative SIMS are included that demonstrate the advantage of this facility for surface analysis and depth profiling. The SIMS secondary ion collection has been modeled using the ray tracing program simion (“simion”, Scientific Instrument Services, Inc., Ringoes, NJ, 08551-1054, see http://www.simion.com) in order to understand the interaction of the secondary ions of opposite polarities in the extraction volume for the purpose of optimizing secondary ion collection

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Section: Instrument Configurationmentioning

confidence: 99%

Simultaneous detection of positive and negative secondary ions

Chater

Smith

Cooke

2016

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

Self Cite

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show abstract

“…Innovatively, the system was operated such that positive and negative sputtered ions could be detected simultaneously -the former by a FEI FIB200-SIMS detector, the latter by a Hiden EQS1000 system [11,28].…”

Section: Focussed Ion-beam With Secondary Ion Mass Spectrometry (Fib-mentioning

confidence: 99%

Understanding the “blue spot”

Saunders

Chapman

Walker

et al. 2016

Engineering Failure Analysis

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During hot component fatigue tests there have been two cases of low life crack initiation of gas turbine rotating parts manufactured from the Titanium alloy Ti-6246. Both exhibited a small (~0,1mm) elliptical "blue spot" at the origin. Through validated striation count work and fracture mechanics it was established that fatigue had propagated with a near-nil initiation life. Early investigation suggested that the "blue spot" was possibly a region of stage 1 fatigue growth, and was therefore a material behaviour concern with potential implications for service. During an investigation of a later cracking incident in this alloy, subsequently shown to have resulted from Stress-corrosion cracking (SCC), near-identical fractographic characteristics to that seen in the "blue spot" were found that subtly differentiated it from stage 1 fatigue. Also, similar "blue spots" have since been identified on Ti6246 Laboratory hot LCF test specimens and found to have been due to contamination by NaCl, through the application of focussed long-term EDX examination and other novel chemical analyses techniques. By the application of those techniques, fractography, and comparison against these specimens, Rolls-Royce and Imperial College London have collaborated to show that the original two component "blue spots" were subtle examples of NaCl-related Hot Salt Stress-Corrosion Cracking (HSSCC). Such cracking has not been found to occur in service components, due to air pressure within the engine, and the effect is therefore confined to Laboratory and component tests at near-atmospheric pressure or below.

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Environmentally assisted fatigue crack nucleation in Ti–6Al–2Sn–4Zr–6Mo

et al. 2015

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An unexplained feature was observed at the fatigue crack origin of a number of α/β titanium specimens tested at 450• C in the low cycle fatigue regime. The origin was discoloured blue but this was not a result of temper colouration; this feature sometimes resulted in large reductions in fatigue lives. A number of specimens were examined to determine the cause and formation mechanism of these "blue spots." This feature was associated with elevated oxygen and chloride levels and the presence of sodium. A mechanism based on hot-salt stress-corrosion cracking is proposed and the implications for service components are discussed.

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Differentially pumped quadrupole SIMS probe on FIB‐based and two‐beam microscopes

Cited by 4 publications

References 4 publications

Simultaneous detection of positive and negative secondary ions

Simultaneous detection of positive and negative secondary ions

Understanding the “blue spot”

Environmentally assisted fatigue crack nucleation in Ti–6Al–2Sn–4Zr–6Mo

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