Diffractive lenses for high resolution laser based failure analysis

Zachariasse, Frank; Goossens, M.J.

doi:10.1109/ipfa.2006.251006

Cited by 11 publications

(5 citation statements)

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“…Previous works have made approaches in this direction, e.g. by shaping round refractive SILs with computer numerical controlled (CNC) milling [3] and by FIB etching [4] or by creating flat diffractive SILs with FIB for monochromatic (single wavelength) applications [5].…”

Section: Motivation and Optical Aspects Of This Workmentioning

confidence: 99%

Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials – An adaptive calibration algorithm

Scholz

Herfurth

Sadowski

et al. 2014

Microelectronics Reliability

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Section: Motivation and Optical Aspects Of This Workmentioning

confidence: 99%

Efficient and flexible Focused Ion Beam micromachining of Solid Immersion Lenses in various bulk semiconductor materials – An adaptive calibration algorithm

Scholz

Herfurth

Sadowski

et al. 2014

Microelectronics Reliability

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“…This FOSSIL approach can be implemented at the device fabrication stage in order to alleviate SIL positioning errors. Furthermore, Zachariasse et al have reported a novel solid immersion blazed-phase diffractive lens for high resolution laser based failure analysis of silicon ICs [74]. The technique uses a general design algorithm using computer generated holography to create a numerical program that calculates the structure required for reconstruction of a spherical wavefront through a silicon substrate into any user-defined pattern.…”

Section: Solid Immersion Lens Substrates For Enhanced Ic Failure Analmentioning

confidence: 99%

Solid immersion lens applications for nanophotonic devices

Ramsay¹

2008

J. Nanophoton

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Abstract. Solid immersion lens (SIL) microscopy combines the advantages of conventional microscopy with those of near-field techniques, and is being increasingly adopted across a diverse range of technologies and applications. A comprehensive overview of the state-of-the-art in this rapidly expanding subject is therefore increasingly relevant. Important benefits are enabled by SIL-focusing, including an improved lateral and axial spatial profiling resolution when a SIL is used in laser-scanning microscopy or excitation, and an improved collection efficiency when a SIL is used in a light-collection mode, for example in fluorescence micro-spectroscopy. These advantages arise from the increase in numerical aperture (NA) that is provided by a SIL. Other SIL-enhanced improvements, for example spherical-aberration-free sub-surface imaging, are a fundamental consequence of the aplanatic imaging condition that results from the spherical geometry of the SIL. The theory of SIL imaging exposes the unique properties of SILs that provide advantages in applications involving the interrogation of photonic and electronic nanostructures. Such applications range from the sub-surface examination of the complex three-dimensional microstructures fabricated in silicon integrated circuits, to quantum photoluminescence and transmission measurements in semiconductor quantum dot nanostructures.

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“…Solid [3] and liquid [4] immersion lens technologies have been used to extend the diffraction limit by increasing NA. The two main types of solid immersion lens (SIL) technologies that are applicable to backside FA are Refractive SIL (RSIL) [3] and Diffractive SIL [5].…”

Section: Introductionmentioning

confidence: 99%