Diffractive optics calibrator: design and construction

Cai, Wenrui; Zhou, Ping; Zhao, Chunyu; Burge, James H.

doi:10.1117/1.oe.52.12.124101

Cited by 11 publications

(7 citation statements)

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“…A two-axis motorized linear stage is implemented in the system, which is capable of scanning through a CGH with an aperture up to 225 mm In order to measure the duty cycle variation across the CGH aperture, LabVIEW is used to synchronize the scanning motion of the stage with the image acquisition of the camera. Detailed functions of each subsystem are discussed in our previous work [9].…”

Section: A Doc Hardware and Softwarementioning

confidence: 99%

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Diffractive optics calibrator: measurement of etching variations for binary computer-generated holograms

et al. 2014

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We present a new device, the diffractive optics calibrator (DOC), for measuring etching variations of computer-generated holograms (CGHs). The intensity distribution of the far-field diffraction pattern is captured and fitted to a parametric model to obtain local etching parameters such as the duty cycle, etching depth, and grating period. The sensitivity of each etching parameter is analyzed, and design choices are provided. For the wavefront created by the CGH, the DOC is capable of measuring variations in these parameters that cause 1 nm peak-to-valley phase errors. System performance is verified by measurements from a phase shift Fizeau interferometer. This device will be used primarily for quality control of the CGHs. The measurement results can be used to evaluate the fabrication performance and guide future design. DOC is also capable of generating an induced phase error map for calibration. Such calibration is essential for measuring free-form aspheric surfaces with 1 nm root-mean-square accuracy.

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Section: A Doc Hardware and Softwarementioning

confidence: 99%

“…In our previous works, the design, construction, and functions of the DOC were demonstrated [9]. In this paper, we focus on presenting the detailed error analysis and the operation of the DOC to measure the etching variations for a CGH.…”

Section: Introductionmentioning

confidence: 99%

Diffractive optics calibrator: measurement of etching variations for binary computer-generated holograms

et al. 2014

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“…Accordingly, scalar approximation is also used for the testing and calibration of the gratings [4][5][6][7]. For example, a recently reported setup for measuring a line grating is presented by Cai et al [8]. Here the grating is illuminated in transmission.…”

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confidence: 99%

“…In this Letter, we investigate the influence of errors introduced by scalar approximation on quality-control methods, as described in [8]. We use rigorous simulations of perfect 1D line gratings, as shown in Fig 1. These results are used as reference measurement data, which are subsequently used as input for the grating reconstruction algorithms.…”

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Limits of diffractometric reconstruction of line gratings when using scalar diffraction theory

Peterhänsel

Pruß

2014

Opt. Lett.

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We study errors that occur in geometry and phase reconstruction when using scalar diffraction theory in line gratings with periods below 10 μm. The application of those gratings in so-called computer-generated holograms in high-precision interferometric testing of aspheres and free-form surfaces imposes high demands on the generated phase, leading to error budgets in the range of λ/100. Using rigorous simulations as references, we identify the limits where scalar diffraction theory fails to accurately describe grating geometries and identify the significant error mechanisms.

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Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

Chen

Xue

Zhai

et al. 2020

Laser & Photonics Reviews

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Freeform optical surfaces are advantageous to optical designers, as they provide additional degrees of freedom for optimization. The loss of rotational symmetry, however, makes measurement of freeforms more challenging. Herein, advances in interferometric areal measurement of freeform optical surfaces, including null tests, non-null tests, near-null tests, and adaptive null tests, are reviewed. Some new developments, in the Hartmann test, deflectometry, and phase retrieval, as representatives of non-interferometric areal measurement, are then presented. Overall, the focus is on single-point-probe-based profilometry categorized into coordinate measurements and slope-or curvature-based measurements. Innovative measurement technology is trying to bridge the gap between high accuracy and high dynamic range as freeform optical surfaces are finding more applications in visible and shorter-wavelength optics.

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Diffractive optics calibrator: design and construction

Cited by 11 publications

References 0 publications

Diffractive optics calibrator: measurement of etching variations for binary computer-generated holograms

Diffractive optics calibrator: measurement of etching variations for binary computer-generated holograms

Limits of diffractometric reconstruction of line gratings when using scalar diffraction theory

Measurement of Freeform Optical Surfaces: Trade‐Off between Accuracy and Dynamic Range

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