Articles you may be interested inDetection of electron energy distribution function anisotropy in a magnetized electron cyclotron resonance plasma by using a directional Langmuir probe Phys. Plasmas 21, 073510 (2014); 10.1063/1.4890350Optical emission spectroscopy and Langmuir probe diagnostics of CH3F/O2 inductively coupled plasmasThe Langmuir probe as a diagnostic of the electron component within low temperature laser ablated plasma plumes Rev.Diagnostics of inductively amplified magnetron discharges by optical emission, absorption spectroscopy, and Langmuir probe measurements Langmuir probe theory, adapted to magnetized, partially ionized, low temperature processing plasmas with radial diffusion dominated by electron-neutral collisions, was verified in electron cyclotron resonance ͑ECR͒ plasmas. Plasma parameters such as plasma potential, electron temperature, plasma density, and the ratio of electron saturation current to ion saturation current (I e */I i *) were measured by single-sided planar probe in various ECR plasmas ͑H 2 , He, N 2 , O 2 , Ar, and CF 4 ͒. The neutral pressure was varied between 0.5 and 8.5 mTorr and the microwave power between 170 and 1250 W with good matching conditions; the reflected power was kept at less than 3% of the input power. The measured ratios of I e */I i * , and other plasma parameters were consistent with the probe theory for pressures greater than 2.0 mTorr for various plasmas of Ar, He, H 2 , and N 2 . These results indicate that the electron-neutral collisional probe theory works well for magnetized ECR plasmas ͑magnetic flux densities of 0.8-1.0 kG͒.