“…(1) It contains a tightly coupled with the ground coccygeal vertebra (1), MEMS acceleration detector chip(2), the output line (4) and connect the chip and the coccygeal vertebra close shell (3).In seismic exploration, the seismic wave with different stratum reflection to the surface of the ground coupled coccygeal vertebra in the form of vibration signal to MEMS acceleration detector chip [4].As shown in fig2, when the vibration signal reaches the detector chip, quality body (a) the displacement controlled by displacement detector (c) perceive and adjust the electromotive force feedback capacitance change (b), make its produce a balancing force, force quality body keep zero position [1].Capacitance variation depends on the strength of vibration signal and electromotive force variation depends on the capacitance variation, therefore, the change of the electromotive force curve on real-time tracking vibration signal intensity change curve, this is the working principle of the MEMS acceleration detector. It is can be seen that detector chip system is mainly composed of three parts: MEMS sensor acquisition module, A/D conversion module and the signal processing module cache.…”