Direct and accurate patterning of plasmonic nanostructures with ultrasmall gaps

Si, Guangyuan; Zhao, Yanhui; Lv, Jiangtao; Fengwen, Wang; Liu, Hailong; Teng, Jinghua; Liu, Yan Jun

doi:10.1039/c3nr00655g

Cited by 35 publications

(26 citation statements)

References 42 publications

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“…33,34 In addition, the FIB/EB lithography method has a limitation of about 10 nm in the produced annular gap width for a thin metal film. 35 Creating a 10 nm-width gap in a thick metal film (more than 150 nm) is challenging for this method.…”

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confidence: 99%

Self-Assembled Large-Area Annular Cavity Arrays with Tunable Cylindrical Surface Plasmons for Sensing

Wang

Shen

et al. 2015

ACS Nano

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Surface plasmons that propagate along cylindrical metal/dielectric interfaces in annular apertures in metal films, called cylindrical surface plasmons (CSPs), exhibit attractive optical characteristics. However, it is challenging to fabricate these nanocoaxial structures. Here, we demonstrate a practical low-cost route to manufacture highly ordered, large-area annular cavity arrays (ACAs) that can support CSPs with great tunability. By employing a sol-gel coassembly method, reactive ion etching and metal sputtering techniques, regular, highly ordered ACAs in square-centimeter-scale with a gap width tunable in the range of several to hundreds of nanometers have been produced with good reproducibility. Ag ACAs with a gap width of 12 nm and a gap height of 635 nm are demonstrated. By finite-difference time-domain simulation, we confirm that the pronounced dips in the reflectance spectra of ACAs are attributable to CSP resonances excited in the annular gaps. By adjusting etching time and Ag film thickness, the CSP dips can be tuned to sweep the entire optical range of 360 to 1800 nm without changing sphere size, which makes them a promising candidate for forming integrated plasmonic sensing arrays. The high tunability of the CSP resonant frequencies together with strong electric field enhancement in the cavities make the ACAs promising candidates for surface plasmon sensors and SERS substrates, as, for example, they have been used in liquid refractive index (RI) sensing, demonstrating a sensitivity of 1505 nm/RIU and a figure of merit of 9. One of the CSP dips of ACAs with a certain geometry size is angle- (0-70 degrees) and polarization-independent and can be used as a narrow-band absorber. Furthermore, the nano annular cavity arrays can be used to construct solar cells, nanolasers and nanoparticle plasmonic tweezers.

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confidence: 99%

Self-Assembled Large-Area Annular Cavity Arrays with Tunable Cylindrical Surface Plasmons for Sensing

Wang

Shen

et al. 2015

ACS Nano

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“…Typically, two different processes are categorized: top-down and bottom-up fabrication techniques. The former includes focused ion beam (FIB) milling [59][60][61][62], electron-beam lithography (EBL) [63][64][65][66][67], nanoimprint [68][69][70][71], and interference lithography [72][73][74][75]. Various plasmonic designs have been demonstrated to enhance the sensing effect.…”

Section: Plasmonic Nanostructures For Enhanced Sensing Applicationsmentioning

confidence: 99%

Plasmon‐Enhanced Sensing: Current Status and Prospects

Leong

Jiang

et al. 2015

Journal of Nanomaterials

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By combining different plasmonic nanostructures with conventional sensing configurations, chemical/biosensors with significantly enhanced device performance can be achieved. The fast development of plasmon-assisted devices benefits from the advance of nanofabrication technology. In this review, we first briefly show the experimental configurations for testing plasmon enhanced sensing signals and then summarize the classic nanogeometries which are extensively used in sensing applications. By design, dramatic increment of optical signals can be obtained and further applied to gas, refractive index and liquid sensing.

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“…Compared to other nanofabrication techniques, such as electron-beam lithography and reactive ion etching, FIB is much more competitive in fabricating nanostructures with high aspect ratios. We have successfully demonstrated the fabrication of dense nanostructure arrays using FIB in both dielectric and metallic materials [19][20][21][22]. However, high-aspect-ratio slanted nanostructures on flat substrates have not been studied using the FIB technique.…”

Section: Introductionmentioning

confidence: 99%

Maskless fabrication of slanted annular aperture arrays

Khoo

Leong

et al. 2017

Nanotechnology

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We report maskless fabrication of high-aspect-ratio slanted annular aperture arrays (SAAAs) in gold films using focused ion beam lithography. By tilting the substrate, SAAAs with the desired tilting angle can be fabricated. Our experimental results demonstrate accurate control over aperture size, obliqueness, and reproducibility. We also show that the resulted plasmonic resonances of SAAAs can be effectively tuned via obliqueness control. This versatile approach may enable fabrication of more complicated plasmonic nanostructures. The demonstrated gold SAAAs could also find many potential applications in plasmon-assisted sensing and surface enhanced spectroscopy.

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Direct and accurate patterning of plasmonic nanostructures with ultrasmall gaps

Cited by 35 publications

References 42 publications

Self-Assembled Large-Area Annular Cavity Arrays with Tunable Cylindrical Surface Plasmons for Sensing

Self-Assembled Large-Area Annular Cavity Arrays with Tunable Cylindrical Surface Plasmons for Sensing

Plasmon‐Enhanced Sensing: Current Status and Prospects

Maskless fabrication of slanted annular aperture arrays

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