Direct creation of three-dimensional photonic crystals by a top-down approach

Takahashi, Shigeki; Suzuki, Katsuyoshi; Okano, Makoto; Imada, Masahiro; Nakamori, Takeshi; Ota, Yuji; Ishizaki, Kenji; Noda, Susumu

doi:10.1038/nmat2507

Cited by 144 publications

(111 citation statements)

References 19 publications

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“…These newly introduced waveguides can channel photons robustly in arbitrary directions with ready control of transmission bandwidth and also may be decorated with defects to produce sharply resonant structures useful for filtering and frequency splitting. These results demonstrate that hyperuniform disordered photonic materials may offer advantages to improve various technological applications that may benefit from a PBG (29,30) [e.g., displays, lasers (31), sensors (32), telecommunication devices (33), and optical microcircuits (34)]. Our findings are applicable to all wavelengths.…”

Section: Discussionmentioning

confidence: 52%

Isotropic band gaps and freeform waveguides observed in hyperuniform disordered photonic solids

Man

Florescu

Williamson

et al. 2013

Proc. Natl. Acad. Sci. U.S.A.

220

204

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Recently, disordered photonic media and random textured surfaces have attracted increasing attention as strong light diffusers with broadband and wide-angle properties. We report the experimental realization of an isotropic complete photonic band gap (PBG) in a 2D disordered dielectric structure. This structure is designed by a constrained optimization method, which combines advantages of both isotropy due to disorder and controlled scattering properties due to low-density fluctuations (hyperuniformity) and uniform local topology. Our experiments use a modular design composed of Al 2 O 3 walls and cylinders arranged in a hyperuniform disordered network. We observe a complete PBG in the microwave region, in good agreement with theoretical simulations, and show that the intrinsic isotropy of this unique class of PBG materials enables remarkable design freedom, including the realization of waveguides with arbitrary bending angles impossible in photonic crystals. This experimental verification of a complete PBG and realization of functional defects in this unique class of materials demonstrate their potential as building blocks for precise manipulation of photons in planar optical microcircuits and has implications for disordered acoustic and electronic band gap materials. The first examples of synthetic materials with complete photonic band gaps (PBGs) (1, 2) were photonic crystals using Bragg interference to block light over a finite range of frequencies. Because of their crystallinity, the PBGs are highly anisotropic, a potential drawback for many applications. The idea that a complete PBG (blocking all directions and all polarizations) can exist in isotropic disordered systems is striking, because it contradicts the longstanding intuition that periodic translational order is necessary to form PBGs. The paradigm for PBG formation is Bloch's theorem (3): a periodic modulation of the dielectric constant mixes degenerate waves propagating in opposite directions and leads to standing waves with high electric field intensity in the low dielectric region for states just above the gap and in the high dielectric region for states just below the gap. Long-range periodic order, as evidenced by Bragg peaks, is necessary for this picture to hold. The intrinsic anisotropy associated with periodicity may limit the scope of PBG applications greatly and places a major constraint on device design. For example, although 3D photonic crystals with complete PBGs have been fabricated for two decades (4), 3D waveguiding continues to be a challenge. Very recently, Noda and coworkers reported the first successful demonstration of 3D waveguiding (5). However, they found that because of the mismatch of the propagation modes in line defects along various symmetry orientations, vertical-trending waveguides must follow one particular major symmetry direction to effectively guide waves out of the horizontal symmetry plane in a 3D woodpile photonic crystal (5).Recently, disordered photonic media and random textured surfaces have attracted incr...

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Section: Discussionmentioning

confidence: 52%

Isotropic band gaps and freeform waveguides observed in hyperuniform disordered photonic solids

Man

Florescu

Williamson

et al. 2013

Proc. Natl. Acad. Sci. U.S.A.

220

204

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“…Using a Faraday cage, the direction of the ion acceleration can be altered so that oblique etching will occur. [14][15][16][17] We have demonstrated patterned oblique etching using both reactive ion etch and inductively coupled plasma etch systems using a Faraday cage to direct the etchant species obliquely. Our Faraday cage was machined into a 45∕45∕90 wedge out of a solid stainless steel block.…”

Section: Membrane Projection Lithographymentioning

confidence: 99%

Device-level and module-level three-dimensional integrated circuits created using oblique processing

Burckel¹

2016

J. Micro/Nanolith. MEMS MOEMS

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, "Device-level and module-level three-dimensional integrated circuits created using oblique processing," J. Abstract. This paper demonstrates that another class of three-dimensional integrated circuits (3-D-ICs) exists, distinct from through-silicon-via-centric and monolithic 3-D-ICs. Furthermore, it is possible to create devices that are 3-D "at the device level" (i.e., with active channels oriented in each of the three coordinate axes), by performing standard CMOS fabrication operations at an angle with respect to the wafer surface into high aspect ratio silicon substrates using membrane projection lithography (MPL). MPL requires only minimal fixturing changes to standard CMOS equipment, and no change to current state-of-the-art lithography. Eliminating the constraint of two-dimensional planar device architecture enables a wide range of interconnect topologies which could help reduce interconnect resistance/capacitance, and potentially improve performance. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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“…1(b)] increases the bandgap to 18% [13]. The Yablonovite [14,15] and woodpile [16,17] bulk 3D PhCs, both of 18% gap size, call for angled etching. By combining membrane stacking with angled etching, one can envision fabricating Yablonovite-like PhC structures in which controlled defects are introduced in any layer.…”

mentioning

confidence: 99%

Three-dimensional photonic crystals by large-area membrane stacking

Lü¹,

Cheong²,

Smith³

et al. 2012

Opt. Lett.

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We designed and analyzed a "mesh-stack" three-dimensional photonic crystal of a 12.4% bandgap with a dielectric constant ratio of 12 : 1. The mesh-stack consists of four offset identical square-lattice air-hole patterned membranes in each vertical period that is equal to the in-plane period of the square lattice. This design is fully compatible with the membrane-stacking fabrication method, which is based on alignment and stacking of large-area single-crystal membranes containing engineered defects. A bandgap greater than 10% is preserved as long as the membranes are subjected to in-plane misalignment less than 3% of the square period. By introducing a linear defect with a nonsymmorphic symmetry into the mesh-stack, we achieved a single-mode waveguide over a wide bandwidth. © 2012 Optical Society of America OCIS code: 160.5293, 050.6875, 130.5296, 220.4241. Three-dimensional (3D) photonic crystals (PhCs) [1][2][3] promise unprecedented control of light, but their development at optical frequencies has been limited by fabrication challenges. Recent developments [4,5] in the membrane-stacking [6] technology for fabricating 3D PhCs offer the possibility of achieving centimeter-scale 3D PhCs containing controlled defects using optimal materials including single-crystal materials. Devices can be incorporated into each single-crystal membrane using planar technologies, and the membranes are then aligned and stacked to form 3D PhCs. This membrane-stacking method requires every membrane layer to be suspendible and self-supporting. In contrast, each layer of the popular woodpile structure [7] consists of disconnected rods. No previously reported 3D PhC design with a full bandgap [1,8] is known to satisfy this topological constraint of suspendability without considerably complicating the fabrication process. In this Letter, we present a 3D PhC design ("mesh-stack") that is fully compatible with the large-area membrane-stacking fabrication approach. A single-mode waveguide design is also provided. The mesh-stack structure is illustrated in Fig. 1(a), where five identical membranes are stacked. Each membrane in a vertical period is colored differently; the first and fifth layers (red color) are periodically equivalent. Only two materials are used: air and a high-index material of dielectric constant (ϵ) of 12. This mesh-stack structure has the diamond lattice [8] shown in Fig. 1(b), when c a. Each air hole in the mesh-stack is located at a lattice point of the diamond structure. It is well known that the diamond structure has the largest bandgap (27.6% at ϵ 12). Likewise, the mesh-stack with the diamond structure also possesses a full 3D bandgap.Since the layered configuration breaks the cubic symmetry along theẑ direction, we allow the vertical period c to be away from a in order to optimize the bandgap size (similar to the procedure taken for the woodpile design [7]). This changes the diamond structure from its original face-centered-cubic (fcc) lattice to the face-centered-tetragonal (fct) lattice. We define the air-...

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Direct creation of three-dimensional photonic crystals by a top-down approach

Cited by 144 publications

References 19 publications

Isotropic band gaps and freeform waveguides observed in hyperuniform disordered photonic solids

Isotropic band gaps and freeform waveguides observed in hyperuniform disordered photonic solids

Device-level and module-level three-dimensional integrated circuits created using oblique processing

Three-dimensional photonic crystals by large-area membrane stacking

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