Direct electron-beam-induced formation of nanometer-scalecarbon structures in STEM. - I. Nature of "long-range" growth outside the substrate

Аристов, В. В.; Kislov, Nikolai; Khodos, I. I.

doi:10.1051/mmm:0199200304031300

Cited by 17 publications

(20 citation statements)

References 12 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Figure 1 presents a typical EELS spectrum recorded during rods formation. This spectrum is similar to those acquired when the electron beam travels at a certain distance outside the carboncontaining ledge [8,9]. The energy loss peak at 20 eV substantially differs from the value of the plasmon loss when the beam passes through a carbon-containing material (25 eV) [11].…”

Section: Introductionsupporting

confidence: 54%

“…As it has been mentioned above it was supposed [2] that contamination broadening is mainly due to Auger electrons. At the same time theoretical estimations [13] and experimental data [14] in [9]) can be explained by two causes. One of them is the following.…”

Section: Introductionmentioning

confidence: 99%

“…We have previously reported that carbon-containing ledges are formed at the rim of film substrates when the electron beam passes outside at a distance of up to 30 nm from its edge [8,9]. The effect has been accounted for by surface plasmon excitation or dirrect excitation followed by the dissociation of hydrocarbon molecules on the surface.…”

Section: Introductionmentioning

confidence: 99%

“…The possibility of direct excitation of multiatomic hydrocarbon molecules present on the surface, is not ruled out [8,9].…”

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Direct electron-beam-induced formation of nanometer-scale carbon structures in STEM. - II. The growth of rods outside the substrate

Kislov

Khodos

1992

Microsc. Microanal. Microstruct.

Self Cite

View full text Add to dashboard Cite

show abstract

Section: Introductionsupporting

confidence: 54%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

“…The possibility of direct excitation of multiatomic hydrocarbon molecules present on the surface, is not ruled out [8,9].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Direct electron-beam-induced formation of nanometer-scale carbon structures in STEM. - II. The growth of rods outside the substrate

Kislov

Khodos

1992

Microsc. Microanal. Microstruct.

Self Cite

View full text Add to dashboard Cite

show abstract

“…We looked for independent estimates of plasmon delocalization and studied two separated cases: ͑1͒ a 100 -keV primary electron excites a surface plasmon on the target situated in vacuum at distance b and ͑2͒ a 100-keV primary electron excites a surface plasmon on a precursor molecule situated in vacuum at a distance b and dissociates it. We used very simple models available for these two situations, namely, those published by Aristov et al, 44 Howie, 45 and Ferrell and Echenique. 46 We calculated the probability that the primary electron will excite a surface plasmon on the target and on the precursor molecule, respectively, at an im- FIG.…”

Section: The Role Of the Delocalization Of Secondaryelectron Genermentioning

confidence: 99%

Spatial resolution limits in electron-beam-induced deposition

Silvis-Cividjian

Hagen

Kruit

2005

Journal of Applied Physics

101

116

View full text Add to dashboard Cite

Electron-beam-induced deposition ͑EBID͒ is a versatile micro-and nanofabrication technique based on electron-induced dissociation of metal-carrying gas molecules adsorbed on a target. EBID has the advantage of direct deposition of three-dimensional structures on almost any target geometry. This technique has occasionally been used in focused electron-beam instruments, such as scanning electron microscopes, scanning transmission electron microscopes ͑STEM͒, or lithography machines. Experiments showed that the EBID spatial resolution, defined as the lateral size of a singular deposited dot or line, always exceeds the diameter of the electron beam. Until recently, no one has been able to fabricate EBID features smaller than 15-20 nm diameter, even if a 2-nm-diam electron-beam writer was used. Because of this, the prediction of EBID resolution is an intriguing problem. In this article, a procedure to theoretically estimate the EBID resolution for a given energetic electron beam, target, and gaseous precursor is described. This procedure offers the most complete approach to the EBID spatial resolution problem. An EBID model was developed based on electron interactions with the solid target and with the gaseous precursor. The spatial resolution of EBID can be influenced by many factors, of which two are quantified: the secondary electrons, suspected by almost all authors working in this field, and the delocalization of inelastic electron scattering, a poorly known effect. The results confirm the major influence played by the secondary electrons on the EBID resolution and show that the role of the delocalization of inelastic electron scattering is negligible. The model predicts that a 0.2-nm electron beam can deposit structures with minimum sizes between 0.2 and 2 nm, instead of the formerly assumed limit of 15-20 nm. The modeling results are compared with recent experimental results in which 1-nm W dots from a W͑CO͒ 6 precursor were written in a 200-kV STEM on a 30-nm SiN membrane.

show abstract

Electron‐beam‐induced fabrication of metal‐containing nanostructures

et al. 1996

View full text Add to dashboard Cite

Summary: An experimental system based on a transmission electron microscope JEM-100CX has been developed for electron beam-induced chemical vapor deposition. Direct electron beam-induced growth of nanometer-wide self-supporting rods has been performed inside the microscope operating in scanning mode by decomposition of carbonyls of chromium Cr(CO) 6 , tungsten W(CO) 6 , and rhenium Re 2 (CO) 10 . In situ phase and structure transformations under annealing inside the microscope column were studied. Nanoscale rods and strips grown from rhenium carbonyl are of special interest because, after annealing, they consist of a single pure rhenium phase. The described method of metallic nanoelements fabrication enables us to produce highly conductive nanowires and tips for application in nanoelectronics, emission electronics, and scanning tunneling microscopy.

show abstract

Direct electron-beam-induced formation of nanometer-scalecarbon structures in STEM. - I. Nature of "long-range" growth outside the substrate

Cited by 17 publications

References 12 publications

Direct electron-beam-induced formation of nanometer-scale carbon structures in STEM. - II. The growth of rods outside the substrate

Direct electron-beam-induced formation of nanometer-scale carbon structures in STEM. - II. The growth of rods outside the substrate

Spatial resolution limits in electron-beam-induced deposition

Electron‐beam‐induced fabrication of metal‐containing nanostructures

Contact Info

Product

Resources

About