2023
DOI: 10.1016/j.matdes.2023.111597
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Direct fabrication of arrays of Cu(In,Ga)Se2 micro solar cells by sputtering for micro-concentrator photovoltaics

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Cited by 5 publications
(3 citation statements)
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“…Thermal annealing was introduced prior to selenization to remove any possible photoresist incorporated into the CIG micro-dot during sputtering [ 30 ], to improve the precursor quality. Hence, the sample was placed inside a vacuum pot and placed on a heating plate.…”
Section: Methodsmentioning
confidence: 99%
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“…Thermal annealing was introduced prior to selenization to remove any possible photoresist incorporated into the CIG micro-dot during sputtering [ 30 ], to improve the precursor quality. Hence, the sample was placed inside a vacuum pot and placed on a heating plate.…”
Section: Methodsmentioning
confidence: 99%
“…Subsequently, the resist was removed by lift-off with acetone followed by plasma asher treatment to eliminate any residual photoresist, leaving the SiOx layer with the CIG micro-dots. To prevent Mo oxidation, which starts at 300 °C, a low-temperature plasma asher process was employed Thermal annealing was introduced prior to selenization to remove any possible photoresist incorporated into the CIG micro-dot during sputtering [30], to improve the precursor quality. Hence, the sample was placed inside a vacuum pot and placed on a heating plate.…”
Section: Cig Precursor Deposition Followed By 2-stage Selenizationmentioning
confidence: 99%
“…In addition, combined methods are becoming popular, such as electrochemical etching with simultaneous deposition and a sol-gel method with thermal annealing. In this case, such a problem arises as the control of the content of Cu and In metals [33,34]. This can lead to excessive conductivity of the obtained layers, which nega-NON-VACUUM DESIGN OF CuGaxIn1-xSe2 FILMS FOR SOLAR ENERGY APPLICATIONS 595 tively affects the efficiency of photovoltaic energy converters based on Cu(In, Ga)Se2 structures [35,36].…”
Section: Introductionmentioning
confidence: 99%