Direct Growth of Graphene Films on 3D Grating Structural Quartz Substrates for High-Performance Pressure-Sensitive Sensors

Abstract

Conformal graphene films have directly been synthesized on the surface of grating microstructured quartz substrates by a simple chemical vapor deposition process. The wonderful conformality and relatively high quality of the as-prepared graphene on the three-dimensional substrate have been verified by scanning electron microscopy and Raman spectra. This conformal graphene film possesses excellent electrical and optical properties with a sheet resistance of <2000 Ω·sq(-1) and a transmittance of >80% (at 550 nm), which can be attached with a flat graphene film on a poly(dimethylsiloxane) substrate, and then could work as a pressure-sensitive sensor. This device possesses a high-pressure sensitivity of -6.524 kPa(-1) in a low-pressure range of 0-200 Pa. Meanwhile, this pressure-sensitive sensor exhibits super-reliability (≥5000 cycles) and an ultrafast response time (≤4 ms). Owing to these features, this pressure-sensitive sensor based on 3D conformal graphene is adequately introduced to test wind pressure, expressing higher accuracy and a lower background noise level than a market anemometer.

An Omni‐Healable and Highly Sensitive Capacitive Pressure Sensor with Microarray Structure

“…[1][2][3][4] As an important component of wearable devices, pressure sensors, with the ability to emulate the sensory properties of skin by converting pressure stimulation into detectable electrical signals, are critical for applications in healthcare monitoring, [5][6][7][8][9][10] soft robotics, [11][12][13] and prosthetics. [14][15][16] In terms of the sensing mechanism,s everalt ypes of pressure sensors, including piezoresistive, [17][18][19][20][21] piezoelectric, [22][23][24] and capacitive sensors have been reported. Among them, capacitive pressure sensors utilizing ap ressure-induced capacitance change have received significant attention for their low energy consumption, fast response time, low detection limit, and sensing stability.…”

Recent Progress of Self‐Powered Sensing Systems for Wearable Electronics

“…Usually, piezoresistive sensing materials are mostly concentrated in the elastomer composites with incorporated conductive fillers such as conductive polymers (CPs), metal particles, carbon nanotubes (CNTs), and reduced graphene oxide (rGO) into elastomers (e.g., polyurethane (PU) and polydimethylsiloxane (PDMS)) . Most recently, some conductive fibers with unique properties like biocompatibility, and superhydrophobic, and thin films are also served as sensing materials for piezoresistive sensors . For example, Haniff et al reported a plasma‐doping graphene sheet‐based flexible pressure sensor with typical piezoresistive effects .…”

Recent Progress in Flexible Microstructural Pressure Sensors toward Human–Machine Interaction and Healthcare Applications

“…Generally, pressure sensors transfer the applied pressure into electrical signals based on the piezoelectric, [ 36–40 ] piezoresistive, [ 17,41–45 ] capacitive, [ 46–51 ] or triboelectric sensing mechanism. [ 52–54 ] Figure shows the schematic diagrams of different working mechanisms of pressure sensors.…”