2002
DOI: 10.1143/jjap.41.1247
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Direct Growth of High-Quality InxGa1-xAs Strained Layers on Misoriented GaAs Substrates Grown by Metalorganic Chemical Vapor Deposition

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Cited by 9 publications
(4 citation statements)
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“…For InGaAs layers with In composition of less than 0.35, the growth temperature in MOVPE was typically 600 1C, where high quality GaAs layers were grown [4,5]. However, low temperature growth at less than 500 1C was reported as effective for InGaAs layers with In composition of 0.5 [6,7]. InAs with threading dislocation density of 1.6 Â 10 7 cm À2 can be grown by MOVPE at 400 1C on GaAs substrates using graded buffer layers [8].…”
Section: Introductionmentioning
confidence: 99%
“…For InGaAs layers with In composition of less than 0.35, the growth temperature in MOVPE was typically 600 1C, where high quality GaAs layers were grown [4,5]. However, low temperature growth at less than 500 1C was reported as effective for InGaAs layers with In composition of 0.5 [6,7]. InAs with threading dislocation density of 1.6 Â 10 7 cm À2 can be grown by MOVPE at 400 1C on GaAs substrates using graded buffer layers [8].…”
Section: Introductionmentioning
confidence: 99%
“…The studied films were grown by the MOCVD system [8] on a (100)-oriented Si-doped GaAs substrate. The epitaxial layers were grown on a substrate at 850 0 C with a growth rate about 0.8um/hr.…”
Section: Methodsmentioning
confidence: 99%
“…The epitaxial films of the UV LED structures were grown in a MOCVD reactor [13]. NH 3 and MO-sources flow were separated to reduce undesirable parastic reaction.…”
Section: Methodsmentioning
confidence: 99%