Direct laser writing of 3D polymer micro/nanostructures on metallic surfaces

Rekštytė, Sima; Žukauskas, Andrius; Purlys, Vytautas; Gordienko, Yuri; Malinauskas, Mangirdas

doi:10.1016/j.apsusc.2013.01.034

Cited by 37 publications

(17 citation statements)

References 22 publications

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“…25,26 Such constructs are very promising for stem cell based biomedicine. 27 Most importantly it enables creation and integration of arbitrary shaped templates on metallic, 28 reflective and opaque 29 as well as absorbing surfaces. 30 Doping of the polymer material opens new pathways for the implementation of their active optical functionalities.…”

Section: Introductionmentioning

confidence: 99%

Mesoscale 3D manufacturing: varying focusing conditions for efficient direct laser writing of polymers

Jonušauskas

Malinauskas

2014

SPIE Proceedings

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In this paper, we report a novel approach for efficient fabrication of mesoscale polymer 3D microstructures. It is implemented by direct laser writing varying exposure beam focusing conditions. By carefully optimizing the fabrication parameters (laser intensity, scanning velocity/exposure time, changing objective lens) complex 3D geometries of the microstructures can be obtained rapidly. Additionally, we demonstrate this without the use of the photoinitiator as photosensitizer doped in the pre-polymer material (SZ2080). At femtosecond pulsed irradiation ∼TW/cm 2 intensities the localized free radical polymerization is achieved via avalanche induced bond braking. Such microstructures have unique biocompatibility and optical transparency as well as optical damage threshold value. By creating the bulk part of the structure using low-NA (0.45) objective and subsequently fabricating the fine features using oil immersion high-NA (1.4) objective the manufacturing time is reduced dramatically (30 x is demonstrated). Using this two objective method a prototype of functional microdevice was produced: 80 and 85 µm diameter microfluidic tubes with the fine filter consisting of 4 µm period grating structure that has 400 nm wide threads, which corresponds to a feature precision aspect ratio of ∼200. Therefore, such method has great potential as a polymer fabrication tool for mesoscale optical, photonic and biomedical applications as well as highly integrated 3D µ-systems. Furthermore, the proposed approach is not limited to lithography and can be implemented in a more general type of laser writing, such as inscription within transparent materials or substractive manufacturing by ablation.

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Section: Introductionmentioning

confidence: 99%

Mesoscale 3D manufacturing: varying focusing conditions for efficient direct laser writing of polymers

Jonušauskas

Malinauskas

2014

SPIE Proceedings

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“…[1][2][3][4][5][6] However, the spatial resolutions are inherently governed by Abbe's diffract limitation-analogous to optical microscopy. The feature sizes fabricated by 800-nm fs laser are usually larger than 200 nm.…”

Section: Introductionmentioning

confidence: 99%

Super resolution direct laser writing in ITX resist inspired by STED microscopy

Yuan

Liu

Jia

et al. 2014

J. Nonlinear Optic. Phys. Mat.

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Direct laser writing (DLW) has become a routine tool for fabricating microstructures through two photon polymerization. Due to the diffraction limit, the resolution is usually larger than a quarter of a wavelength. In this article, by using stimulated emission depletion (STED) inspired lithography, we fabricate nanodot of 81 nm in diameter and nanoline of 93 nm in width in resist with initiator of isopropyl thioxanthone (ITX). An 800 nm, 75-MHz fs laser works as the polymerization light and a 532 nm donut mode continuous wave (CW) laser as the depletion light. This technology is potentially useful for fabrication of super resolution nanostructures.

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“…This interaction has enabled the construction of a 3D biomimetic structure with high-resolution (from lm to nm) that could not have been obtained by traditional photolithography. 42 However, multi-photon polymerization requires the laser beam to pass through the entire photo-curable material without attenuation, which limits its application to only transparent materials, such as SU-8, 41 ORMOCERÒ, 42,43 ORMOCOMPÒ, 44 ORMOSILÒ, 45,46 zirconium based organic-inorganic hybrid material (SZ2080), [47][48][49] IP-L780 50 and biocompatible hydrogels. 51 With customsynthesized hybrid materials, 3D scaffolds can be fabricated with tunable geometries (e.g., porosity, pore size etc.)…”

Section: D Structure Fabrication Using Multi-photon Polymerizationmentioning

confidence: 99%

Laser-assisted biofabrication in tissue engineering and regenerative medicine

et al. 2016

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Controlling the spatial arrangement of biomaterials and living cells provides the foundation for fabricating complex biological systems. Such level of spatial resolution (less than 10 lm) is difficult to be obtained through conventional cell processing techniques, which lack the precision, reproducibility, automation, and speed required for the rapid fabrication of engineered tissue constructs. Recently, laserassisted biofabrication techniques are being intensively developed with the use of computer-aided processes for patterning and assembling both living and nonliving materials with prescribed 2D or 3D organization. In this review, we discuss laser-assisted fabrication methods, including laser tweezers, multi-photon polymerization, laser-induced forward transfer (LIFT), matrix assisted pulsed laser evaporation (MAPLE), and laser ablation as well as their applications in biological science and biomedical engineering. These advanced technologies enable the precise manipulation of in vitro cellular microenvironments and the ability to engineer functional tissue constructs with high complexity and heterogeneity, which serve in regenerative medicine, pharmacology, and basic cell biology studies.

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Direct laser writing of 3D polymer micro/nanostructures on metallic surfaces

Cited by 37 publications

References 22 publications

Mesoscale 3D manufacturing: varying focusing conditions for efficient direct laser writing of polymers

Mesoscale 3D manufacturing: varying focusing conditions for efficient direct laser writing of polymers

Super resolution direct laser writing in ITX resist inspired by STED microscopy

Laser-assisted biofabrication in tissue engineering and regenerative medicine

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