Direct modification of silicon surface by nanosecond laser interference lithography

Wang, Dapeng; Wang, Zuobin; Zhang, Ziang; Yue, Yong; Li, Dayou; Maple, Carsten

doi:10.1016/j.apsusc.2013.05.042

Cited by 52 publications

(31 citation statements)

References 24 publications

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“…They characterize the surface morphology and chemical compositions of the microstructures using the analytical tools. The modification of silicon surface using a nanosecond laser irradiation pulse was carried out by Wang et al [13]. They indicated that increasing of laser fluences resulted in melt and evaporation while texturing the surface.…”

Section: Page 4 Of 33mentioning

confidence: 99%

Characteristics of laser textured silicon surface and effect of mud adhesion on hydrophobicity

Yilbaş

Ali

Khaled

et al. 2015

Applied Surface Science

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Section: Page 4 Of 33mentioning

confidence: 99%

Characteristics of laser textured silicon surface and effect of mud adhesion on hydrophobicity

Yilbaş

Ali

Khaled

et al. 2015

Applied Surface Science

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“…The structure is a direct consequence of the intensity modification [20] . Due to the high laser fluence, melt and evaporation behaviors of the laser ablation are the main mechanisms to modify the surface [19] . With the interaction of the laser beams, water-repellent structures can be created on the stent surface.…”

Section: Fig1 Photo Of the Compressed And Expanded Coronary Artery Smentioning

confidence: 99%

“…And the critical feature sizes of the micro-structures and nanostructures are related to the laser fluence and the exposure time during the fabrication process. Besides, the model of pattern depends on the number of beams, for instance, grate and moth-eye structures are achieved by two-beam and six-beam laser interferences, respectively [13,19] . Fig.2 Simulation results of (a) two-dimensional and (b) three-dimensional intensity distribution of three-beam laser interference with the incident angle of 3° and the period of 12 µm A three-beam interference system was built to produce the interference pattern for inducing concave structures on the stent surface.…”

Section: Fig1 Photo Of the Compressed And Expanded Coronary Artery Smentioning

confidence: 99%

Fabrication of hydrophobic structures on coronary stent surface based on direct three-beam laser interference lithography

Gao

Zhou

Wang

et al. 2016

Optoelectron. Lett.

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To solve the problems with coronary stent implantation, coronary artery stent surface was directly modified by three-beam laser interference lithography through imitating the water-repellent surface of lotus leaf, and uniform micro-nano structures with the controllable period were fabricated. The morphological properties and contact angle (CA) of the microstructure were measured by scanning electron microscope (SEM) and CA system. The water repellency of stent was also evaluated by the contact and then separation between the water drop and the stent. The results show that the close-packed concave structure with the period of about 12 µm can be fabricated on the stent surface with special parameters (incident angle of 3°, laser energy density of 2.2 J·cm -2 and exposure time of 80 s) by using the three-beam laser at 1 064 nm, and the structure has good water repellency with CA of 120°.The coronary artery stent implantation has become the first choice for the treatment of coronary heart disease (CHD) in the world currently. Although the equipment and medication are increasingly improved, in-stent restenosis (ISR) is still a major defect of stent implantation [1] . Due to the occurrence of restenosis, still more than 15% patients with coronary stent implantation will accept interventional therapy in a year [2] . Therefore, it is of great significance to develop a new type of coronary stent, which has low restenosis rate and can prevent late stent thrombosis. In recent years, the studies show that the biocompatibility of the materials could be increased by the biomimetic process of surface and coating [3][4][5][6][7][8] . Consequently, the preparing bionic surface with regular geometric structure is beneficial to the rapid, directional and orderly adhesion and the growth of endothelial cells, which can reduce the formation of restenosis and late thrombosis.Laser interference lithography (LIL) has been applied in many fields, such as solar cells [9,10] , nano-scale patterned sapphire substrate [11] and bionics [12,13] . And studies have shown that the minimum feature size of direct LIL can reach 27 nm (laser wavelength of 308 nm, pulse width no more than 10 ns) [14] , which can fully meet the requirements of the process in this paper. Compared with other approaches, such as electron beam lithography, ion beam lithography and scanning probe lithography, which adopt the point by point writing strategy [15,16] , LIL reduces the required processing time by using multi-beam simultaneously. In addition, the long focal depth and the maskless process of LIL lower the flatness requirements of substrate and can realize imaging on a non-planar surface without affecting the resolution and image contrast.In this paper, LIL is used to modify the surface of coronary stent by imitating the water-repellent surface of lotus leaf. Test results show that the processed stent has good water repellency, which can achieve the desired effects.LIL is very suitable to process the coronary stent with the structure of mesh tubes, as shown in Fig....

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“…Castro-Hurtado et al reported that the tungsten oxide (WO 3 ) thin films were modified by three-and four-beam laser interference lithography and the nanostructures with the feature sizes of 150-160nm in diameter were achieved. In the conclusion, they pointed out that the outstanding nanostructured films could be used as sensing layers for the detection of hazardous gases such as NO 2 and H 2 S [12]. It can be seen from literatures that numerous efforts have been devoted to the fabrication of devices and functional materials based on the micro and nano structures by LIL.…”

Section: Introductionmentioning

confidence: 99%

“…Laser interference lithography (LIL), as a powerful method for the fabrication of periodic micro and nano structures, is attracting extensive attentions for many applications [1,2].…”

Section: Introductionmentioning

confidence: 99%

Determination of beam incidence conditions based on the analysis of laser interference patterns

Wang

Yue

et al. 2015

Optik

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Direct modification of silicon surface by nanosecond laser interference lithography

Cited by 52 publications

References 24 publications

Characteristics of laser textured silicon surface and effect of mud adhesion on hydrophobicity

Characteristics of laser textured silicon surface and effect of mud adhesion on hydrophobicity

Fabrication of hydrophobic structures on coronary stent surface based on direct three-beam laser interference lithography

Determination of beam incidence conditions based on the analysis of laser interference patterns

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