Fluctuations in the number, energy level, and carrier capture rate of Si/SiO 2 interface traps in small-gate-area metal-oxidesemiconductor field-effect transistors (MOSFETs) containing only a few interface traps have been directly observed. This observation is based on an understanding of charge pumping phenomena and a newly observed phenomenon of on(off)-time-dependent charge pumping characteristics in their rising (falling) portion. It is directly shown from experimental results that the fluctuation in the number of interface traps contained in an individual nanoscale MOSFET is fairly large, and that there are various interface traps with individual discrete energy levels and carrier capture rates. These fluctuations may have an impact on the variation in device performance of future digital metal-insulator-semiconductor (MIS) devices.