2010
DOI: 10.1149/1.3490301
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Direct Solid-State Electrochemical Synthesis of Silicon Tetrachloride from Silica at Ambient Temperatures and Pressures

Abstract: Silicon tetrachloride (SiCl4) is one of the most important chemical compounds in the microelectronic industries. Commercial scale synthesis of SiCl4 is usually performed by roasting silica (SiO2) and cokes (C) under flowing chlorine (Cl2) gas at temperatures {greater than or equal to}900oC. At room temperatures and atmospheric pressures, the formation of SiCl4 from Cl2, SiO2 and C can be calculated to be favorable with ΔGreaction as low as -120.77 kJ/mol. This paper reports the use of I-V characterization t… Show more

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Cited by 2 publications
(3 citation statements)
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“…On the other hand, STC is industrially manufactured via the chlorination process using metallurgical Si, ferro Si, Si carbide, and agricultural rice husk. , However, this chlorination process occurs at high reaction temperatures (i.e., 400–1100 °C), leading to severe equipment corrosion, high energy consumption, and low purity in the product. Inspired by the Si hydrochlorination and chlorination process, should some novel catalysts be developed to improve STC selectivity and lower TCS production, it would be possible to produce STC using a hydrochlorination reactor currently being used to manufacture TCS in industry.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…On the other hand, STC is industrially manufactured via the chlorination process using metallurgical Si, ferro Si, Si carbide, and agricultural rice husk. , However, this chlorination process occurs at high reaction temperatures (i.e., 400–1100 °C), leading to severe equipment corrosion, high energy consumption, and low purity in the product. Inspired by the Si hydrochlorination and chlorination process, should some novel catalysts be developed to improve STC selectivity and lower TCS production, it would be possible to produce STC using a hydrochlorination reactor currently being used to manufacture TCS in industry.…”
Section: Introductionmentioning
confidence: 99%
“…On the other hand, STC is industrially manufactured via the chlorination process using metallurgical Si, 31 ferro Si, 32 Si carbide, 33 and agricultural rice husk. 34,35 However, this chlorination process occurs at high reaction temperatures (i.e., 400−1100 °C), leading to severe equipment corrosion, high energy consumption, and low purity in the product.…”
Section: Introductionmentioning
confidence: 99%
“…. Currently, SiO 2 is positioned as an important raw material for cement, glass, semiconductor, and optical communications industries. Silicon tetrachloride (SiCl 4 ) produced from SiO 2 has been conventionally used as a feedstock gas in the production of fine ceramics such as high-purity SiO 2 , SiC, and SiN 4 by chemical vapor deposition . Traditionally, SiCl 4 has been produced by reacting chlorine gas with SiC, produced from a mixture of SiO 2 and carbon, at a temperature of approximately 600 °C .…”
Section: Introductionmentioning
confidence: 99%