“…1 For this reason, Ge-based ͑such as GeMn͒ diluted magnetic semiconductors ͑DMSs͒, compatible with the current Si technology, have been studied extensively. [2][3][4][5][6][7][8][9][10][11][12][13] It is well understood that the low solubility of Mn in Ge has been a main barrier to achieve a high T c DMS GeMn film with high Mn concentration and uniformly distributed Mn in Ge. As a consequence, Mn-rich precipitates, such as Mn 5 Ge 3 , 9,14,15 Mn 5 Ge 2 , and Mn 11 Ge 8 , 12 are usually observed and are believed to be responsible for the observed ferromagnetism up to room temperature.…”