Direct subdivision of Moire fringe with CCD

Long, Pin

doi:10.1117/12.2294694

Cited by 3 publications

(2 citation statements)

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“…With regard to the fringe subdivision technique, although there have been many methods proposed by various researches, such as curve fitting [16,17], signal modulation [18] and CCD [19], this research developed a simple and quick method of triangulation form approximation by computing |sin θ| − |cos θ| from the output signals, as shown in figure 9. The complete cycle counting and directional sensing can be done by a conventional up/down counter.…”

Section: The Driving System and Feedback Sensormentioning

confidence: 99%

Development of a low-cost micro-CMM for 3D micro/nano measurements

Fan

Fei

et al. 2006

Meas. Sci. Technol.

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A high-precision and low-cost micro-CMM (coordinate measuring machine) is under development. The expected measuring range is 25 × 25 × 10 mm 3 and the resolution is 1 nm. In order to enhance the structural accuracy, some new ideas are integrated into the design, such as the arch-shape bridge for better stiffness and thermal accuracy, and the co-planar stage for less Abbe error. The linear diffraction grating interferometer and subdivision technique is proposed for position sensing to nanometre resolution. The focusing probe on the laser interferometer feedback spindle is structured in the Z-axis to guarantee the nanometre stability. In this report, the detailed design principles of the developed micro-CMM are described. The performance evaluation of each module of the prototype micro-CMM is presented. The positioning resolution of each axis to 1 nm can be achieved by combining the coarse and fine motion control on a piezo-ceramic linear motor. The Z-axis measurement can be controlled to within 15 nm repeatability. Parts of the positioning repeatability of the co-planar stage have been achieved to 30 nm. Some problems due to current techniques will be addressed.

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Section: The Driving System and Feedback Sensormentioning

confidence: 99%

Development of a low-cost micro-CMM for 3D micro/nano measurements

Fan

Fei

et al. 2006

Meas. Sci. Technol.

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“…For example, the electronic subdivision factor can reach up to 1/1000 in phase-shifting interferometry [7]. Also, by use of a fast analog-to-digital converter or a calibration technique, the electronic subdivision factors of from 1/100 to 1/2000 can be obtained with CCDs, the subdivision factor of 1/2048 can be achieved by a combination of optical and electronic subdivisions [8][9][10][11][12], and by use of two acousto-optic modulators for heterodyne frequency generation and digital signal processing demodulation electronics the fringe interpolation accuracy can reach 1/36 000 [13]. However, the above fringe subdivision techniques demand that the intensities and phases of interference signals should be kept invariable during the measurement.…”

Section: Introductionmentioning

confidence: 99%

Signal processing method of a laser synthetic wavelength interferometer

Yan¹,

Chen²,

Li³

et al. 2009

Meas. Sci. Technol.

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A laser synthetic wavelength interferometer that uses a large synthetic wavelength to subdivide fringes formed by a small single wavelength is described. This study emphasizes the interference signal processing for the interferometer to realize precision measurement. A novel fringe counting method of correcting the integer number of the interference fringe according to the displacement which corresponds to the fraction number is proposed. Through this method, the integer fringe counting error can be eliminated. The realization of the method is designed in detail. The experimental setup was constructed and the displacement experiment was performed in the range of 15 μm with 1 μm increment. The experimental results show that the average error is −2.64 nm and the standard deviation is 0.47 nm. This demonstrates the feasibility of the signal processing method for the laser synthetic wavelength interferometer.

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Study of a noncontact type micro-CMM with arch-bridge and nanopositioning stages

Fan

Fei

et al. 2007

Robotics and Computer-Integrated Manufacturing

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Direct subdivision of Moire fringe with CCD

Cited by 3 publications

References 0 publications

Development of a low-cost micro-CMM for 3D micro/nano measurements

Development of a low-cost micro-CMM for 3D micro/nano measurements

Signal processing method of a laser synthetic wavelength interferometer

Study of a noncontact type micro-CMM with arch-bridge and nanopositioning stages

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