Study of a noncontact type micro-CMM with arch-bridge and nanopositioning stages

Fan, Kuang‐Chao; Fei, Yetai; Yu, Xinge; Wang, Weili; Chen, Yejin

doi:10.1016/j.rcim.2006.02.007

Cited by 22 publications

(5 citation statements)

References 15 publications

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“…The design of the structure of meso-scale machine tool must take into account the rigidity to withstand the weight of the spindle system. As a result, according to the former design of several different shapes of the machine tool structure, and using ANSYS finite element analysis software to analyze the best machine structure, the result of the pagoda-type structure was the most stable [10]. This work follows previous pagoda-type structure design, and makes some improvements design to clamp and integrate the new Z-axis for a high speed air bearing spindle.…”

Section: Design Of the Meso-scale 3-axis Machine Toolmentioning

confidence: 86%

Development of a Meso-scale Machine Tool and the Preliminary Cutting Tests of Oxygen-free Copper Using a Polycrystalline Diamond Tool

Shiou¹,

Fan²,

Pan³

et al. 2012

Computer-Aided Design and Applications

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This work presents the development of a meso-scale 3-axis milling machine with a nanometer resolution. Regarding the Z-axis design of the meso-scale 3-axis milling machine, it mainly includes a pagoda structure, the high speed air bearing spindle, two HR8 ultrasonic motors, a laser diffraction grating interferometer system (LDGI), and a coaxial counter-balance system for the spindle. The optimal geometrical dimensions of the pagoda structure have been determined by ANSYS software. According to the simulation results, the maximum static deformation along the z-axis of the pagoda was about 5.05 nm. The designed meso-scale 3-axis milling machine is equipped with an X-Y coplanar positioning stage with nanometer resolution, including the low-cost components and two ultrasonic motors, in order to reduce the complexity and error resulted from the combination of a long-stroke stage and short-travel stage. The coplanar stage developed by Nation Taiwan University was integrated with two laser diffraction grating interferometer system as displacement feedback sensors, so that a two-axis closed-loop control was possible. The positioning accuracy of the coplanar stage was about 50nm after error compensation using the gate mode, base on the test results. A circular positioning test with the radius of 7 mm using the developed stage was tested, and the overall roundness error was about 0.094 mm based on the preliminary test results. A preliminary cutting tests for the oxygen-free copper using a polycrystalline diamond tool have been investigated with respect to different depth of cut and cutting speed on the developed meso-scale machine tool.

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Section: Design Of the Meso-scale 3-axis Machine Toolmentioning

confidence: 86%

Development of a Meso-scale Machine Tool and the Preliminary Cutting Tests of Oxygen-free Copper Using a Polycrystalline Diamond Tool

Shiou¹,

Fan²,

Pan³

et al. 2012

Computer-Aided Design and Applications

Self Cite

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“…The moving component and grating scale are equipped at the working table to reduce the Abbe offset. Those micro-CMMs would also pay attention to the structure for reducing the Abbe error [48,49]. For those machines, which do not conform to the Abbe principle, researchers proposed methods for modeling and compensation for Abbe error [50], which is similar to the modeling of geometric errors.…”

Section: Other Errormentioning

confidence: 99%

Surface form inspection with contact coordinate measurement: a review

Shen

Ren

Huang

et al. 2023

Int. J. Extrem. Manuf.

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Parts with high-quality freeform surfaces have been widely used in industries, which require strict quality control during the manufacturing process. Among all the industrial inspection methods, contact measurement with coordinate measuring machines or computer numerical control machine tool is a fundamental technique due to its high accuracy, robustness, and universality. In this paper, the existing research in the contact measurement field is systematically reviewed. First, different configurations of the measuring machines are introduced in detail, which may have influence on the corresponding sampling and inspection path generation criteria. Then, the entire inspection pipeline is divided into two stages, namely the pre-inspection and post-inspection stages. The typical methods of each sub-stage are systematically overviewed and classified, including sampling, accessibility analysis, inspection path generation, probe tip radius compensation, surface reconstruction, and uncertainty analysis. Apart from those classical research, the applications of the emerging deep learning technique in some specific tasks of measurement are introduced. Furthermore, some potential and promising trends are provided for future investigation.

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“…A lot of research to develop ultra precise CMM has been carried out to achieve efficient measurement of microsystems. For instance, development of CMM with 50 × 50 × 50 mm measuring volume and sub-micrometer volumetric uncertainty at National Physical Laboratory (NPL) by Peggs et al [43], Silicon-based Nanoprobe System by Haitjema et al [47], sub-atomic measuring machine (SAMM) by Hocken et al [48], design principles of micro-CMM with expected measuring range 25 × 25 × 10 mm and resolution of 1 nm by Fan et al [49] represent some of the successful developments in this field. Scientists at Germany's national metrology institute [51] successfully transformed microscope into micro/nano CMM.…”

Section: Evolution Of Micro/nano Cmmsmentioning

confidence: 99%

New developments in coordinate measuring machines for manufacturing industries

Mian

Al-Ahmari

2014

Int. J. Metrol. Qual. Eng.

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Abstract. There have been substantial improvements in measurement systems in order to meet fluctuating market demands. This rapid change and development in measurement technology has primarily been governed by demands of accuracy and precision from aerospace, automotive and other manufacturing industries. Coordinate measuring machines (CMMs) available with different technologies and configurations has efficiently been fulfilling customer demands for more than a decade. Though, current CMMs can meet needs of rapid and increased demands of customers to a greater extent but still there is lot of scope for improvement and development in CMMs. The globalization of manufacturing has resulted in development of variety of complex products and miniaturization of mechanical components. The technology of micro/nanoscale 3D measurement is still a bottleneck for industries. Therefore, precise and accurate system which is flexible enough to deal with complexities of parts and micro & nano range products has to be investigated. In this paper, comprehensive review concerning CMMs with capabilities to measure micro/nano features has been presented. This work has also discussed different methods to estimate measurement uncertainty, as well as performance evaluation of CMMs. Moreover, novel concepts such as intelligent CMM, multi-sensor CMM, virtual CMM have been presented.

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Study of a noncontact type micro-CMM with arch-bridge and nanopositioning stages

Cited by 22 publications

References 15 publications

Development of a Meso-scale Machine Tool and the Preliminary Cutting Tests of Oxygen-free Copper Using a Polycrystalline Diamond Tool

Development of a Meso-scale Machine Tool and the Preliminary Cutting Tests of Oxygen-free Copper Using a Polycrystalline Diamond Tool

Surface form inspection with contact coordinate measurement: a review

New developments in coordinate measuring machines for manufacturing industries

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