Direct Transfer of Kinetic Data from a Microbalance into a Tube Reactor for CVD BN on SiC Fabrics

Abstract

BN deposition from B,B¢,B²-trichloroborazine/Ar gas mixtures is investigated in a microbalance system with a parallel flow arrangement, and in a tube reactor for the deposition on the fiber surface of SiC fiber fabrics. The deposition rates, r dep , in the microbalance system were simulated by numerical solution of all differential equations necessary for the description of the hydrodynamic problem (computer code Fluent). The molar deposition rate, r dep , was described by a Langmuir±Hinshel-wood type formula r dep = k r Kc/ (1+Kc) . The evaporation rate of the precursor was also simulated. The experiments were carried out in the deposition range: total pressure p = 250±1000 Pa, deposition temperature T dep = 1050±1233 K, concentration of the precursor c = 10±3 mol m ±3. The deposition on fabrics was carried out in a tube reactor under similar deposition conditions. The deposition was simulated with the data obtained in the microbalance system. Characteristic numbers are derived where, in the case of the Langmuir±Hinshelwood formula, a constant deposition rate can be reached.

Preparation and Characterization of Copper Nanocomposite Textiles

“…Surface coatings by metallic materials have attracted a lot of attention in recent years due to their special surface properties, such as heat radiation resistance, antimicrobial, electrical conductive, and chemical resistant properties [2]. Various techniques, such as electroless deposition, sol-gel coating, and chemical vapor deposition (CVD) have been used to build functional nanostructures on textile materials [3][4][5]. Electroless deposition and sol-gel coating are usually performed in liquid solution; therefore the use of these techniques may generate waste solutions and other pollutants.…”