Direct-write polymer nanolithography in ultra-high vacuum

Lee, Woo Kyung; Yang, M. J.; Laracuente, A. R.; King, William P.; Whitman, L. J.; Sheehan, Paul E.

doi:10.3762/bjnano.3.6

Cited by 7 publications

(4 citation statements)

References 19 publications

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“…In a similar approach, self-assembled monolayers of poly(4-dodecylthiophene) (PDDT) were achieved 112 . The number of monolayers can be precisely controlled by the scanning speed of the heated probe 113 as shown in Fig. 8a.…”

Section: Direct Deposition Of Functional Materialsmentioning

confidence: 99%

“…It was found that the width of the deposited line depends on the tip load, cantilever Overview of relevant nanofabrication processes after addition of material to the sample from a heated tip. a Direct deposition of a molten material 108,[111][112][113][114][115][116]127 or a loaded carrier matrix (e.g., polymer containing nanoparticles), which can be removed after the transfer 117 . b Direct deposition of a resist for dry etching into the substrate material 118,121 .…”

Section: Direct Deposition Of Functional Materialsmentioning

confidence: 99%

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Thermal scanning probe lithography—a review

et al. 2020

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Fundamental aspects and state-of-the-art results of thermal scanning probe lithography (t-SPL) are reviewed here. t-SPL is an emerging direct-write nanolithography method with many unique properties which enable original or improved nano-patterning in application fields ranging from quantum technologies to material science. In particular, ultrafast and highly localized thermal processing of surfaces can be achieved through the sharp heated tip in t-SPL to generate high-resolution patterns. We investigate t-SPL as a means of generating three types of material interaction: removal, conversion, and addition. Each of these categories is illustrated with process parameters and application examples, as well as their respective opportunities and challenges. Our intention is to provide a knowledge base of t-SPL capabilities and current limitations and to guide nanoengineers to the best-fitting approach of t-SPL for their challenges in nanofabrication or material science. Many potential applications of nanoscale modifications with thermal probes still wait to be explored, in particular when one can utilize the inherently ultrahigh heating and cooling rates.

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Section: Direct Deposition Of Functional Materialsmentioning

confidence: 99%

Section: Direct Deposition Of Functional Materialsmentioning

confidence: 99%

Thermal scanning probe lithography—a review

et al. 2020

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“…It is the integration of multiple systems and ease of use in multiple settings that sets the purely MEMS-based writers apart. AFM based Dip pen nanolithography 25 and oxidation nanolithography [26][27][28] are also related nanofabrication methods, but the applicability in terms of types of materials deposited as well as operational temperatures and pressures are very different.…”

Section: B Mems Plates Apertures and Shutters As Writing Toolsmentioning

confidence: 99%

Building a Fab on a Chip

et al. 2014

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Semiconductor fabs are large, complex industrial sites with costs for a single facility approaching $10B. In this paper we discuss the possibility of putting the entire functionality of such a fab onto a single silicon chip. We demonstrate a path forward where, for certain applications, especially at the nanometer scale, one can consider using a single chip approach for building devices with significant potential cost savings. In our approach, we build micro versions of the macro machines one typically finds in a fab, and integrating all the components together. We argue that the technology now exists to allow one to build a Fab on a Chip.

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“…Voltage applied across the cantilever legs induces an electric current, which generates heat in the tip region due to Joule heating. Initially, heatable cantilevers were designed for data storage , but found an application in nanolithography. − Several groups have used these cantilevers to investigate thermal properties of polymers for transition temperature microscopy, scanning thermal expansion microscopy, thermally assisted atomic force acoustic microscopy, as well as nanotopography imaging …”

Section: Introductionmentioning

confidence: 99%

An Evaluation of Local Thermal Analysis of Polymers on the Sub-Micrometer Scale Using Heated Scanning Probe Microscopy Cantilevers

2014

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A basic understanding of thermal properties of polymers is of fundamental importance for the development of advanced polymers. However, up to now, mainly bulk properties have been investigated. To characterize local softening processes in polymers, a local thermal analysis (LTA) technique is applied as an add-on to a scanning probe microscope. The development of a new generation of heatable cantilever probes enables thermal analysis in the sub-μm range. This method is based on an appropriate temperature calibration, which provides a reliable correlation of the applied voltage heating the tip and the actual temperature at the tip-sample interface. As the presented technique is more susceptible to environmental changes than comparable macroscopic methods, different parameters that might influence its performance are evaluated like a strong dependence on sample temperature. It is shown that the measured softening temperature on a polystyrene (PS) sample decreases from 102.2 to 66.4 °C as the temperature of the substrate is increased by 50 °C. The interaction between heat from the cantilever and the substrate is the reason for local sample softening, which opens new perspectives to understand the temperature calibration process using the melting standard method. A stepwise guideline for a suitable temperature calibration is provided.

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Direct-write polymer nanolithography in ultra-high vacuum

Cited by 7 publications

References 19 publications

Thermal scanning probe lithography—a review

Thermal scanning probe lithography—a review

Building a Fab on a Chip

An Evaluation of Local Thermal Analysis of Polymers on the Sub-Micrometer Scale Using Heated Scanning Probe Microscopy Cantilevers

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