Single-molecule localization microscopy (SMLM) is a powerful
tool
that is routinely used for nanoscale optical imaging of biological
samples. Recently, this approach has been applied to study optically
active defects in two-dimensional (2D) materials. Such defects can
not only alter the mechanical and optoelectronic properties of 2D
materials but also bring new functionalities, which make them a promising
platform for integrated nanophotonics and quantum sensing. Most SMLM
approaches, however, provide a field of view limited to ∼50
× 50 μm2, which is not sufficient for high-throughput
characterization of 2D materials. Moreover, the 2D materials themselves
pose an additional challenge as their nanometer-scale thickness prevents
efficient far-field excitation of optically active defects. To overcome
these limitations, we present here a waveguide-based platform for
large field-of-view imaging of 2D materials via total internal reflection
excitation. We use this platform to perform large-scale characterization
of point defects in chemical vapor deposition-grown hexagonal boron
nitride on an area of up to 100 × 1000 μm2 and
demonstrate its potential for correlative imaging and high-throughput
characterization of defects in 2D materials.