Direct writing of metal conductors with near-uv light

Gilgen, H. H.; Cacouris, T.; Shaw, Ping‐Shine; Krchnavek, Robert R.; Osgood, R. M.

doi:10.1007/bf00694811

Cited by 77 publications

(27 citation statements)

References 25 publications

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“…[136], Gilgen et al [20], and Flynn et al [30] during attempts to deposit metallic molybdenum from Mo(CO)g. observed only for systems with photon fluences large enough to cause multiphoton dissociation (MPD) [36]. In 760 torr of pure helium, the excited complex can undergo MPD to produce Mo* which relaxes by emitting blue-green fluorescence.…”

Section: Discussion Of Resultsmentioning

confidence: 99%

“…In this work mass spectrometry was used to monitor the products of secondary reactions during the laser induced deposition of TiSi^ from TiCl^ and SiH*. [20]. In this work it was shown that deposition of tungsten, molybdenum, and platinum from W(CO)g, Mo(CO)g, and a fluorinated acetylacetonate platinum compound respectively, were activated photolytically.…”

Section: Photolytic Activationmentioning

confidence: 99%

“…The energy provided by one 248 ran photon is 115 kcal/mol (5 eV) which is more than enough to account for the breeiking of 2 metal ligand bonds (0^^^^ = 25.6 kcal/mol, = 37 kcal/mole). [20,[39][40][41]. In all reported cases a thermal component was necessary to produce films with acceptable levels of carbon and oxygen contamination.…”

Section: Carbonylsmentioning

confidence: 99%

“…In all reported cases a thermal component was necessary to produce films with acceptable levels of carbon and oxygen contamination. In the absence of laser heating [20] or elevated surface temperatures [40], the resulting films are highly contaminated. The process is known to be photolytically activated in the gas phase for wavelengths from 257 nm to 193 nm.…”

Section: Carbonylsmentioning

confidence: 99%

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Laser photodeposition of molybdenum oxide thin films from organometallic precursors

Olson

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Section: Discussion Of Resultsmentioning

confidence: 99%

Section: Photolytic Activationmentioning

confidence: 99%

Section: Carbonylsmentioning

confidence: 99%

Section: Carbonylsmentioning

confidence: 99%

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Laser photodeposition of molybdenum oxide thin films from organometallic precursors

Olson

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“…In earlier studies, various types of metal carbonyls such as Ni(CO) 4 , Fe(CO) 5 , Cr(CO) 6 , Mo(CO) 6 or W(CO) 6 have been used for metal deposition in the form of microstructures or extended thin films [11][12][13][17][18][19]. In the present study, tungsten carbonyl, W(CO) 6 , was chosen as the reaction material to deposit micrometer-scale tungsten lines.…”

Section: Methodsmentioning

confidence: 99%

Hybrid LCVD of micro-metallic lines for TFT-LCD circuit repair

Park¹,

Kim²,

Shin³

et al. 2006

Applied Surface Science

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Photochemical Technology, Survey

Sahyun

2000

Kirk-Othmer Encyclopedia of Chemical Technology

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Intense research in photochemistry has provided a substantial base of photochemical technologies for industrial application. The state-of-the-art in applied photochemistry has been reviewed through 1989 (1) and subsequently benchmarked at the International Symposium on Perspectives in Photochemistry in 1992 (2). The oldest recorded continuously practiced application of photochemical technology is the processing of natural dyes of the indigo class as used in the traditional Japanese textile craft of aizome (see Dyes, natural; Textiles) (3). Practice of aizome, popular for over 10 centuries, is no longer of commercial importance.Photoimaging is another use of photochemical technology (see Imaging technology). The first known photographic image was recorded by Nièpce in 1826 by the photocross-linking of bitumen (see Coal) coated in a thin layer on a glass plate; exposure of the plate took several days in a camera oscura (4). Bitumen is a naturally occurring mixture of oligomerized, aromatic, and unsaturated hydrocarbons which undergo cross-linking on absorption of the ultraviolet component of sunlight. Oil of lavender was used as a developer to remove uncrosslinked hydrocarbon from unexposed regions of the plate to reveal the negative image (see Photography). This photochemical innovation gave rise to modern photopolymer technology which is responsible for the environmentally significant solventless coatings ( qv) industry (5,6).Photochemical technology has been developed so as to increasingly exploit inorganic and organometallic photochemistries (2, 7), recognizing the importance of photoinduced electron transfer as the phenomenological basis of a majority of commercially successful photochemical technologies (5, 8). Use of coherent light sources in industrial applications has led to the field of photodynamic therapy as a photochemically based medical technology (9-11). The application of photochemistry to information storage and communication processes is expected (12) (see Resist materials).

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Direct writing of metal conductors with near-uv light

Cited by 77 publications

References 25 publications

Laser photodeposition of molybdenum oxide thin films from organometallic precursors

Laser photodeposition of molybdenum oxide thin films from organometallic precursors

Hybrid LCVD of micro-metallic lines for TFT-LCD circuit repair

Photochemical Technology, Survey

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