2002
DOI: 10.1016/s0022-0248(02)01742-6
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Directional crystallization of GaN on high-pressure solution grown substrates by growth from solution and HVPE

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Cited by 33 publications
(38 citation statements)
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“…Moreover, κ room = 227 W/m × K, reported for HVPE GaN sample from Ref. [11] is similar to the value of κ room found in the sample #1. The both samples represent high thermal conductivity substrate material very suitable for high power applications in the field of blue-ultraviolet optoelectronics and GaN/AlGaN based electronics.…”
Section: Resultssupporting
confidence: 87%
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“…Moreover, κ room = 227 W/m × K, reported for HVPE GaN sample from Ref. [11] is similar to the value of κ room found in the sample #1. The both samples represent high thermal conductivity substrate material very suitable for high power applications in the field of blue-ultraviolet optoelectronics and GaN/AlGaN based electronics.…”
Section: Resultssupporting
confidence: 87%
“…We expect that it is caused by an additional contribution of point defects to the thermal resistivity of the samples #2 and #3 with respect to sample #1 (the dislocation density in all used bulk GaN crystals is low). As it is seen from Table 1 pour phase epitaxy (HVPE) film was grown on Ga-polarity face of bulk GaN crystal (70 µm thick) [11]. The layer was 100 µm thick with electron concentration below 10 17 cm -3 .…”
Section: Resultsmentioning
confidence: 99%
“…Free-electron concentration is of 3-5·10 19 /cm 3 , due to oxygen content [7]. Threading dislocation density is of 1-100/cm 2 [3]. The substrates are highly conductive.…”
Section: Experimental and Resultsmentioning
confidence: 99%
“…Thicker epitaxial layers (10-200 µm) are grown by HVPE method, on the Ga-face of the substrates, with a home-made, horizontal system using a quartz reactor [3], in atmospheric pressure. The carrier gas is N 2 , the nitrogen source is ammonia.…”
Section: Experimental and Resultsmentioning
confidence: 99%
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