Discovery of a useful thin-film dielectric using a composition-spread approach

Dover, R. B. van; Schneemeyer, Lynn; Fleming, R. M.

doi:10.1038/32381

Cited by 353 publications

(214 citation statements)

References 11 publications

Supporting

Mentioning

211

Contrasting

Unclassified

Order By: Relevance

“…The approach was later refined by Hanak,6 but did not gain popularity before the widespread use of electronic data analysis and representation. The successful application to high-k dielectrics 7 has lead to an increased interest in sputter-based CCS, with recent work focusing, for example, on transparent conducting oxides. 8 Pulsed Laser Deposition (PLD) can similarly be used for a co-deposition based CCS approach.…”

Section: Introductionmentioning

confidence: 99%

An improved continuous compositional-spread technique based on pulsed-laser deposition and applicable to large substrate areas

Christen

Rouleau

Ohkubo

et al. 2003

Review of Scientific Instruments

View full text Add to dashboard Cite

A new method for continuous compositional-spread (CCS) thin-film fabrication based on pulsed-laser deposition (PLD) is introduced. This approach is based on a translation of the substrate heater and the synchronized firing of the excimer laser, with the deposition occurring through a slit-shaped aperture. Alloying is achieved during film growth (possible at elevated temperature) by the repeated sequential deposition of sub-monolayer amounts. Our approach overcomes serious shortcomings in previous in-situ implementations of CCS based on sputtering or PLD, in particular the variations of thickness across the compositional spread and the differing deposition energetics as function of position. While moving-shutter techniques are appropriate for PLDapproaches yielding complete spreads on small substrates (i.e. small as compared to distances over which the deposition parameters in PLD vary, typically ≈ 1 cm), our method can be used to fabricate samples that are large enough for individual compositions to be analyzed by conventional techniques, including temperaturedependent measurements of resistivity and dielectric and magnetic and properties (i.e. SQUID magnetometry). Initial results are shown for spreads of (Sr 1-x Ca x )RuO 3 .2

show abstract

Section: Introductionmentioning

confidence: 99%

An improved continuous compositional-spread technique based on pulsed-laser deposition and applicable to large substrate areas

Christen

Rouleau

Ohkubo

et al. 2003

Review of Scientific Instruments

View full text Add to dashboard Cite

show abstract

“…Two recent examples illustrate this trend: combinatorial solid state syntheses and screening have been used to identify new blue photoluminescent materials (40) and new insulator (41) compositions. The power of the new methods will make them valuable tools for the industrial materials chemist in the next quarter century.…”

Section: Glimpses Of the Futurementioning

confidence: 99%

Fifty-Year Trends in the Chemical Industry: What Do They Mean for Chemical Education?

Tolman

Parshall

1999

J. Chem. Educ.

View full text Add to dashboard Cite

show abstract

“…In this paper, we consider a combinatorial materials discovery approach called composition-spread, that has been recently applied with success to speed up the discovery of new catalysts [15]. In the composition spread approach, three metals (or oxides) are sputtered onto a silicon wafer using guns pointed at three distinct locations, resulting in a so-called thin film.…”

Section: Combinatorial Materials Discoverymentioning

confidence: 99%

SMT-Aided Combinatorial Materials Discovery

Ermon

Bras

Gomes

et al. 2012

Theory and Applications of Satisfiability Testing – SAT 2012

View full text Add to dashboard Cite

Abstract. In combinatorial materials discovery, one searches for new materials with desirable properties by obtaining measurements on hundreds of samples in a single high-throughput batch experiment. As manual data analysis is becoming more and more impractical, there is a growing need to develop new techniques to automatically analyze and interpret such data. We describe a novel approach to the phase map identification problem where we integrate domain-specific scientific background knowledge about the physical and chemical properties of the materials into an SMT reasoning framework. We evaluate the performance of our method on realistic synthetic measurements, and we show that it provides accurate and physically meaningful interpretations of the data, even in the presence of artificially added noise.

show abstract

Discovery of a useful thin-film dielectric using a composition-spread approach

Cited by 353 publications

References 11 publications

An improved continuous compositional-spread technique based on pulsed-laser deposition and applicable to large substrate areas

An improved continuous compositional-spread technique based on pulsed-laser deposition and applicable to large substrate areas

Fifty-Year Trends in the Chemical Industry: What Do They Mean for Chemical Education?

SMT-Aided Combinatorial Materials Discovery

Contact Info

Product

Resources

About