2002
DOI: 10.1016/s1369-8001(02)00128-2
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Dislocation behavior in heavily germanium-doped silicon crystal

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Cited by 52 publications
(30 citation statements)
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“…In the case of germanium doping, the doping is believed to enhance the diffusivity barrier for O i , or form Ge-O complexes, therefore reducing the availability of interstitial oxygen species to form B-O defects [65]. However, the required germanium doping in the order of 1 × 10 20 cm −3 to prevent LID is probably not desirable for industrial-scale production due to the increased ingot growth costs and tendency to induce the nucleation of multi-crystalline silicon growth [65,66]. For carbon co-doping, carbon is believed to compete with boron for the formation of complexes with oxygen [67].…”
Section: Additional Non-boron Related Doping During Crystal Growthmentioning
confidence: 99%
“…In the case of germanium doping, the doping is believed to enhance the diffusivity barrier for O i , or form Ge-O complexes, therefore reducing the availability of interstitial oxygen species to form B-O defects [65]. However, the required germanium doping in the order of 1 × 10 20 cm −3 to prevent LID is probably not desirable for industrial-scale production due to the increased ingot growth costs and tendency to induce the nucleation of multi-crystalline silicon growth [65,66]. For carbon co-doping, carbon is believed to compete with boron for the formation of complexes with oxygen [67].…”
Section: Additional Non-boron Related Doping During Crystal Growthmentioning
confidence: 99%
“…Generally, in heavily doped crystal growth, when the impurity concentration increases before reaching the maximum solid solubility, cellular growth due to constitutional supercooling occurs and this finally leads to a polycrystalline structure. In the case of Si, constitutional supercooling in CZ crystal growth heavily doped with Sb [4], B [5] and Ge [6] has been reported. The discrimination of constitutional supercooling has been theoretically proposed as follows [7]:…”
Section: Introductionmentioning
confidence: 99%
“…Constitutional supercooling occurs readily when the segregation coefficient is small and the growth rate is large. Indeed, the equilibrium segregation coefficients of Sb, B and Ge are 0.023 [8], 0.8 [8] and 0.5 [6], respectively. In the case of B, k 0 has been found to decrease with increasing B concentration in the melt, to the value 0.38 when constitutional supercooling occurs [5].…”
Section: Introductionmentioning
confidence: 99%
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“…Moreover, it has been reported that flow pattern defects (FPDs) can be reduced in GCZ Si [9]. Furthermore, Ge doping can also increase the mechanical strength by slowing down dislocation movement [10,11]. However, the effects of larger concentrations of Ge doping on CZ silicon are not clear, especially when the concentration of Ge goes up to 10 20 cm -3…”
Section: Introductionmentioning
confidence: 99%