“…An X-ray diffraction study based on precise measurements of the position, broadening and shape of XRD profiles gives information about the microstructural parameters like grain sizes, microstrains and dislocations in thin films or nanocrystalline materials [14][15][16][17][18]. Based on XRD data, there are normally two analysis methods for detailed evaluation of the crystal grain size and microstrain, Warren-Averbach and line integral breadth analysis [14,15,18].…”