Displacement calculation method for homodyne interferometers based on spatial phase delay of beams

Xia, Yizhou; Zhang, Ming; Zhu, Yu; Ye, Weinan

doi:10.1117/1.oe.61.1.014106

Cited by 5 publications

(4 citation statements)

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“…4, the optical path structure of a typical interferometer is a quadruple optical subdivision interferometer based on the parallel reflection characteristics of the CCR. 4 The measured optical path passes through the object to be measured twice, and the upper and lower layers of the optical path are realized after passing through the CCR. The structure is compact, but it puts forward higher requirements for tooling and alignment.…”

Section: Automatic Ghost Reflection Interface Identificationmentioning

confidence: 99%

“…Using different interference signal processing models, the interferometer can be categorized as either homodyne or heterodyne interferometer; according to the reflection of optical components that use mirrors or diffraction grating, it may also be divided into laser interferometer or grating interferometer. [1][2][3][4][5] The principle of the interferometer is that the Doppler effect produced by the displacement of the object to be measured is brought into the interference signal through the interfering beams, which go through a specific structure lens group. The phase shift of the interference signal can be obtained through a certain phase demodulation calculation, and the measurement results of the object displacement can be calculated based on the displacement calculation model.…”

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Identification and analysis of ghost reflection in the interferometers based on ZEMAX by optimization algorithms

Zhang

Xia

et al. 2023

Opt. Eng.

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Laser interferometers and grating interferometers based on optical interferometry are widely used in displacement measurement of precision machining and testing equipment, such as the measurement system of integrated circuit equipment, due to their high precision, noncontact, and large dynamic measurement range. The ghost reflection in optical elements may lead to the periodic nonlinear error of the interferometer and also reduce alternating current/direct current. We propose a general method for automatic ghost reflection interface identification. It can analyze the influence weight of ghost reflection for each interface of any interferometer. In addition, the manufacturing cost of the interferometer is effectively reduced by optimization algorithms that enable ghost reflection avoidance in the interferometer design. Experimental results prove the influence weight of ghost reflection at different positions in the interferometer and provide the parameter selection of the most suitable interface reflection of the interferometer.

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Section: Automatic Ghost Reflection Interface Identificationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Identification and analysis of ghost reflection in the interferometers based on ZEMAX by optimization algorithms

Zhang

Xia

et al. 2023

Opt. Eng.

Self Cite

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“…Many optical detection methods combining spectral analysis, microfluidic technology, and optical metamaterials with high efficiency, sensitivity, and detection ability have been developed and widely used in food, medicinal, and agricultural industries for biological detection and chemical analysis [11][12][13][14]. The optical properties of biological samples are different from the macroscopic optical constants of solids.…”

Section: Introductionmentioning

confidence: 99%

Investigation of Optical Properties and Activity of Wheat Stripe Rust Urediospores

Chen

Yao

2023

Agriculture

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Stripe rust is one of the most common diseases challenging the safe production of wheat. Rapid identification and analysis of urediospores, responsible for disease transmission, are the key to preventing and controlling stripe rust. The current spore detection is time-consuming and requires auxiliary equipment, but many optical detection methods and sensors with high efficiency, sensitivity, and detection ability have been developed and widely used. Thus, the investigation of optical parameters is the prerequisite for optical sensitive detection and is detailed in this study. Firstly, the microscopic images and surface elements of wheat stripe rust urediospores were obtained using a high-resolution electron microscope and an energy spectrum analyzer. The reflectivity and absorptivity spectra in the near-infrared band of active/inactivate urediospores were measured. Further, the optical parameters, such as reflection phase shift, complex refractive index, and dielectric constant, of the urediospores were analyzed based on electromagnetic theory and Kramers–Kronig relation. The results revealed that the urediospores have a strong tolerance to near-infrared light, and the real part of the complex refractive index n was between 1.0 and 1.4. These observations indicate that whether the spores are active or not has little effect on the real part and dielectric constant of the complex refractive index but has a significant impact on the imaginary part and extinction coefficient of the complex refractive index, and the corresponding relationship between the optical properties of urediospores and biological components was established. These findings were verified with HPLC-MS and Near-Infrared Spectroscopy Analysis Technology and lay a theoretical foundation for detecting urediospores of wheat stripe rust by using optical sensors. The study provides a reference for the analysis of optical characteristics of other biological samples.

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An undersampling phase measurement algorithm based on parameter estimation for homodyne interferometer

et al. 2023

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Displacement calculation method for homodyne interferometers based on spatial phase delay of beams

Cited by 5 publications

References 0 publications

Identification and analysis of ghost reflection in the interferometers based on ZEMAX by optimization algorithms

Identification and analysis of ghost reflection in the interferometers based on ZEMAX by optimization algorithms

Investigation of Optical Properties and Activity of Wheat Stripe Rust Urediospores

An undersampling phase measurement algorithm based on parameter estimation for homodyne interferometer

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