Displacement Sensing with a Mechanically Tunable Photonic Crystal

Abstract

We demonstrate a mechanically tunable photonic crystal designed for highly position sensitive reflection. Our measurements show that the reflectivity changes from 5.8 to 69% for a 90 nm displacement.

Photonic Crystal Ring Resonator Based Optical Filters

“…Among these, the most efficient way to tune the resonant (operating) wavelength of the ADF is changing the refractive index of the material since it is not resulting in degradation of filter performance. Recent year, the exploration of tunablity for 2D PC based optical devices is mainly being carried out with respect to the refractive index [39,40], lattice constant [41] and radius of the rod [42]. There are several tuning mechanisms such as thermal tuning [39], mechanical tuning [42,43], MEMS actuator [44] etc., are reported to change the structural parameters.…”

Two-axis MEMS scanner with transfer-printed high-reflectivity, broadband monolithic silicon photonic crystal mirrors

“…In this paper, we describe a two-axis MEMS scanner with transfer-printed, highreflectivity, broadband PC mirrors. Stress-free, monolithic PC mirrors were fabricated in a SCS device layer of a silicon-on-insulator (SOI) wafer using GOPHER (generation of photonic element by RIE) process [13], and attached to MEMS scanners using transfer printing [14]. This technique increases design flexibility by allowing optical components with different characteristics to be integrated on a common MEMS platform.…”