1990
DOI: 10.1016/0925-4005(90)80266-3
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Disposable oxygen electrodes fabricated by semiconductor techniques and their application to biosensors

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Cited by 16 publications
(8 citation statements)
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“…In the present fabrication, the oxygen-permeable membrane below the PDMS container readily and strongly adhered to the glass substrate due to the PDMS container-glass bonding. This greatly reduced the failure ratio which is usually high in dip-or spin-coating fabrication [3][4][5][6]8,9]. Fig.…”
Section: Fabrication Of Miniature Clark Oxygen Sensormentioning
confidence: 97%
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“…In the present fabrication, the oxygen-permeable membrane below the PDMS container readily and strongly adhered to the glass substrate due to the PDMS container-glass bonding. This greatly reduced the failure ratio which is usually high in dip-or spin-coating fabrication [3][4][5][6]8,9]. Fig.…”
Section: Fabrication Of Miniature Clark Oxygen Sensormentioning
confidence: 97%
“…Additionally, the adhesion force of the oxygen-permeable membrane to the electrode surface also affects the durability of miniature Clark sensors. Generally, the membrane is immobilized with a physical adhesion force using dipping [4][5][6]8], spinning [3,9], casting [10], or glue-assisted techniques [2]. In the present fabrication, the oxygen-permeable membrane below the PDMS container readily and strongly adhered to the glass substrate due to the PDMS container-glass bonding.…”
Section: Fabrication Of Miniature Clark Oxygen Sensormentioning
confidence: 98%
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“…With the advent of microfabrication, miniaturized planar O 2 electrodes have been produced. In one example, Suzuki et al (1990) produced a 350 µm deep silicon structure with anisotropically etched v-grooves, which contained electrolytes and the surfaces of which included a cathode (working electrode) and an anode. This internal micro-reaction chamber for the polarographic reduction of O 2 was bounded by a gas-permeable membrane based on a negative photoresist.…”
Section: Electrochemical O 2 Monitoringmentioning
confidence: 99%