Dissipative particle dynamics study on directed self-assembly in holes

Nakano, T.; Matsukuma, Masaaki; Matsuzaki, Kei; Muramatsu, Makoto; Tomita, Tadatoshi; Kitano, Takahiro

doi:10.1117/12.2011069

Cited by 10 publications

(4 citation statements)

References 4 publications

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“…Some simulation methods, such as dissipative particle dynamics (DPD) 6,7 and self-consistent field theory (SCFT) 8 have successfully demonstrated the formation of the cylindrical PMMA domain and the bottom PS layer with the sidewalls and bottom surface attractive to the PMMA. These simulation methods could also provide some useful insights into the chain conformation of the block copolymer, although they would be computationally expensive, particularly for the 3-D systems required for the DSA hole shrink process.…”

Section: Introductionmentioning

confidence: 99%

Optimization of directed self-assembly hole shrink process with simplified model

Yoshimoto

Fukawatase

Ohshima

et al. 2014

J. Micro/Nanolith. MEMS MOEMS

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Abstract. Application of the directed self-assembly of block copolymer to the hole shrink process has gained large attention because of the low cost and high potential for sublithographic patterning. In this study, we have employed a simplified model, called the Ohta-Kawasaki model to find the optimal process conditions, which minimize the morphological defects of the diblock copolymer, PS-b-PMMA. The model parameters were calibrated with cross-sectional transmission electron microscopy images. Our simulation results revealed that it is difficult to eliminate the morphological defects (i.e., PS residual layer) by only varying the shape of the guide hole. It turned out that changing the affinity of the bottom surface of the guide hole from "PMMA attractive" to "neutral" is a more effective way to obtain a reasonably wide, defect-free process window. Note that our simulations are not only computationally inexpensive, but are also comparable to the other detailed models such as the selfconsistent field theory; they may also be feasible for large-scale simulations such as the hotspot analysis over a large area. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Section: Introductionmentioning

confidence: 99%

Optimization of directed self-assembly hole shrink process with simplified model

Yoshimoto

Fukawatase

Ohshima

et al. 2014

J. Micro/Nanolith. MEMS MOEMS

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“…In the line‐and‐space realm, DSA of block copolymers in both grapho and chemoepitaxial environments has proved in numerous studies a robust strategy for creating a variety of useful line‐and‐space patterns with long‐range order . Similarly, in the context of Vertical Interconnet Access (VIA) lithography, DSA with cylindrical confinement has been successfully implemented to produce VIA cylinders with a reduced critical dimension (CD) relative to a guiding prepattern . Such reduction in CD alone, however, is insufficient, as the placement of DSA VIAs must be precise to allow the current to pass through various layers of the circuit .…”

Section: Introductionmentioning

confidence: 99%

Directed self‐assembly of linear arrays of block copolymer cylinders

Laachi

Iwama

Delaney

et al. 2014

J Polym Sci B Polym Phys

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We investigate the directed self-assembly (DSA) of cylinder-forming block copolymers inside extended guiding templates of different sizes and shapes. We focus in particular on templates that promote the formation of linear arrays of two or three cylinders for contact hole multiplication. Using self-consistent field theory (SCFT) simulations, we uncover the existence windows for two-and three-cylinder arrays and assess their stability relative to other defective morphologies present in the templates. From SCFT simulations, templates in which three DSA cylinders are the lowest free energy configuration are more prone to defective morphologies in comparison to narrower templates with a two cylinder ground state. The size, placement and pitch of the defect-free structures are estimated for different template sizes and shapes. Beyond the thermodynamic description of the self-assembly process and the ensuing equilibrium properties, we also consider the equally important issue of the kinetics of melting of defects into perfect structures. Using the string method, we compute the most probable kinetic pathways that anneal elementary defects into a desired perfect array of cylinders. Similar to our findings on defectivity levels, defects in three-cylinder-friendly templates are associated with high kinetic barriers > 8 kT while their counterparts in narrower templates more readily dissipate into two-cylinder states after crossing barriers < 2 kT.

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“…In order to prevent from the volumetric flow going through the walls, the hard-wall boundary conditions, i.e., ∇ = 0 (only in the normal direction to the surface) [17], were applied on the sidewalls and on the top and bottom surfaces. The 3D simulations were performed without the thermal fluctuations over 2x10 6 time steps.…”

Section: Dynamics Of Lamella Morphology On Chemically Pre-patterned Smentioning

confidence: 99%

“…Various simulation methods have been successfully applied to the DSA processes: self-consistent field theory (SCFT) [4,5], Monte Carlo (MC) methods [3], dissipative particle dynamics (DPD) [6,7], and coarse-grained molecular dynamics [8]. Due to the computational expense, however, these methods are generally not feasible for the large-scale DSA simulations, e.g., hotspot analysis over a large area, design and process optimizations including numerous parameters.…”

Section: Introductionmentioning

confidence: 99%

Large-Scale Simulations of Directed Self-Assembly with Simplified Model

Yoshimoto

Taniguchi

2013

J. Photopol. Sci. Technol.

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Directed self-assembly (DSA) is considered as a candidate for future patterning technology for semiconductor manufacturing. The DSA utilizes the phase separation of block copolymer and provides further resolution enhancement by the use of chemically and physically pre-patterned surface. In order for DSA to be a viable lithography solution, it is crucial to realize defect-free manufacturing process. In this study, we utilize the so-called Ohta-Kawasaki (OK) model to simulate the morphological defects of block copolymer formed on the chemically and physically pre-patterned surface. The OK model has advantages of the relatively low computational expense, scalability for large-scale simulations, and compatibility to the other simulation models such as self-consistent field theory (SCFT) through common physical properties of the materials. As test cases, we investigated the lamella defects of symmetric diblock copolymer formed on the chemically and physically pre-patterned surface. For the chemically pre-patterned surface, the two-dimensional (2D) dynamic simulations were performed including the thermal fluctuations, and the time evolution of the lamella defects was characterized as a function of the surface interactive parameter. In the three-dimensional (3D) dynamic simulations of the physically pre-patterned surface, effects of the trench width on the formation of the lamella defects was examined. Our preliminary results demonstrate that various types of the DSA lamella defects can be reasonably predicted by the OK model. It is expected that by calibrating the surface interactive parameters with experimental data, the OK model could be applied to various large-scale DSA simulations, e.g., hotspot analysis over a large area, and design/process optimizations with numerous parameters.

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Dissipative particle dynamics study on directed self-assembly in holes

Cited by 10 publications

References 4 publications

Optimization of directed self-assembly hole shrink process with simplified model

Optimization of directed self-assembly hole shrink process with simplified model

Directed self‐assembly of linear arrays of block copolymer cylinders

Large-Scale Simulations of Directed Self-Assembly with Simplified Model

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