“…1(a) -1(d) a more complete picture of the relaxation of EEDF, of dissociative attachment rates, of vibrational distribution Nv, and of D concentration in the post discharge. The results we report have been obtained by applying our model to the experimental conditions (with the discharge on) discussed by Eenshuistra et al [5] (p=2.25 mtorr, discharge voltage 110 V, discharge current 10 A, discharge time 2.66 ms). Moreover, we refer to a D2 discharge since for this system our program contains a better set of electron vibration and dissociative attachment cross sections [6] (see also Ref.…”