2016
DOI: 10.7567/jjap.55.086101
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Dissociation degree of nitrogen molecule in low-pressure microwave-discharge nitrogen plasma with various rare-gas admixtures

Abstract: The dissociation degree of nitrogen molecules is examined in a microwave discharge nitrogen–rare gas mixture plasma with a total discharge pressure of 1 Torr, by actinometry measurement. Although the spectral line from the excited nitrogen atoms is overlapped by the band spectrum of the N2 first positive system (1PS), the subtraction of the 1PS spectrum fitted theoretically can successfully extract the atomic nitrogen line, which enables actinometry measurement. The nitrogen dissociation degree decreases with … Show more

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Cited by 6 publications
(6 citation statements)
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References 32 publications
(53 reference statements)
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“…The vibrational temperatures of both CO 3PS and CO Ångstrom bands is found to be in the range of T v ; 0.2-0.4 eV, which is approximately the same as that for other molecules observed in the microwave discharge plasmas, such as N 2 1PS, N 2 2PS, O 2 A-band, and so on. [34][35][36][37][38]43,45,49) As already shown in the previous subsections, the CO 3PS was well described with the unique rotational temperature T r , while that of the CO Ångstrom band showed anomalous behavior, i.e. it had two rotational temperatures corresponding to the bulk part T r bulk and high-energy tail part T r tail .…”
Section: Vibrational and Rotational Temperatures Of Cosupporting
confidence: 66%
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“…The vibrational temperatures of both CO 3PS and CO Ångstrom bands is found to be in the range of T v ; 0.2-0.4 eV, which is approximately the same as that for other molecules observed in the microwave discharge plasmas, such as N 2 1PS, N 2 2PS, O 2 A-band, and so on. [34][35][36][37][38]43,45,49) As already shown in the previous subsections, the CO 3PS was well described with the unique rotational temperature T r , while that of the CO Ångstrom band showed anomalous behavior, i.e. it had two rotational temperatures corresponding to the bulk part T r bulk and high-energy tail part T r tail .…”
Section: Vibrational and Rotational Temperatures Of Cosupporting
confidence: 66%
“…These observed values are considerably common to the microwave discharge plasmas of any gaseous species in the present device. 34,35,39,40,43) The characteristics of the nonequilibrium were considered to have been caused by the low ionization degree and the resultant electron collisions with atoms and molecules, which were more essential than the Coulomb collisions between the charged species.…”
Section: Resultsmentioning
confidence: 99%
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“…Recent examples include microwave-discharge [31,32] andd ielectric-barrier-discharge (DBD) plasma. Recent examples include microwave-discharge [31,32] andd ielectric-barrier-discharge (DBD) plasma.…”
Section: Introductionmentioning
confidence: 99%
“…The nitrogen dissociation mechanisms and kinetics under variousp lasma environments was also studied and discussed. Recent examples include microwave-discharge [31,32] andd ielectric-barrier-discharge (DBD) plasma. [33] Table 1s ummarized the main dissociative reactions in the DBD and microwavep lasmas.…”
Section: Introductionmentioning
confidence: 99%