This review surveys recent developments of DNA nanotechnology related to its applications in nanoelectronics industry. The authors start with a brief introduction of DNA nanostructures, followed by a focused discussion of various DNA-based fabrication approaches that are relevant to the semiconductor industry, including DNA-based doping of semiconductor materials, DNA-based fabrication of nanostructures of metallic, dielectric, and semiconductor materials, and DNA-based lithographic patterning of Si, SiO 2 , metal, graphene, and polymer substrates. Examples of DNA-templated fabrication of prototype nanoscale transistors and sensors are highlighted. Finally, major technical challenges facing the future applications of DNA nanotechnology in nanoelectronics and beyond are discussed.