DNA Origami Mask for Sub-Ten-Nanometer Lithography

Diagne, Cheikh Tidiane; Brun, Christophe; Gasparutto, Didier; Baillin, Xavier; Tiron, Raluca

doi:10.1021/acsnano.6b00413

Cited by 53 publications

(58 citation statements)

References 29 publications

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“…While much work is still needed to approach commercial viability, lithographically confined DNA origami and large crystalline arrays of DNA origami show potential as self-assembled lithographic masks 12 and templates for precise nanoparticle assemblies.…”

Section: -10mentioning

confidence: 99%

Metrology of DNA arrays by super-resolution microscopy

et al. 2017

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Recent results in the assembly of DNA into structures and arrays with nanoscale features and patterns have opened the possibility of using DNA for sub-10 nm lithographic patterning of semiconductor devices. Super-resolution microscopy is being actively developed for DNA-based imaging and is compatible with inline optical metrology techniques for high volume manufacturing. Here, we combine DNA tile assembly with state-dependent super-resolution microscopy to introduce crystal-PAINT as a novel approach for metrology of DNA arrays. Using this approach, we demonstrate optical imaging and characterization of DNA arrays revealing grain boundaries and the temperature dependence of array quality.For finite arrays, analysis of crystal-PAINT images provides further quantitative information of array properties. This metrology approach enables defect detection and classification and facilitates statistical analysis of self-assembled DNA nanostructures. IntroductionAs the costs and challenges of semiconductor device scaling increase, 1 new materials and technologies that enable precise patterning and placement of nanostructures are sought to supplement or replace current photolithography techniques. 2 For example, nanoscale patterning through directed self-assembly of block-copolymer (BCP) structures has been acknowledged as a viable and inexpensive lithographic mask via the International Technology Roadmap for Semiconductor manufacturing. 3,4 While progress has been made in the precise control of BCP self-assembly, defect densities and directed self-assembly of complex patterns remain challenges for manufacturing. 5 As an alternative technology, the potential for programmable, long-range order through self-assembly makes DNA an attractive material for bottom-up fabrication of nanoscale patterns, 6 as well as for templated-assembly of electronic and photonic devices with nanometer precision. 7-10Within the last two decades, DNA-based techniques such as origami, 6 tiles, 9 and bricks 11 have demonstrated precise control over the size, shape, arrangement, and assembly of DNA nanostructures and nanocomponents. While much work is still needed to approach commercial viability, lithographically confined DNA origami and large crystalline arrays of DNA origami show potential as self-assembled lithographic masks 12 and templates for precise nanoparticle assemblies. 13-18As a result of these advances, the Semiconductor Research Corporation recently listed DNAcontrolled sub-10 nm manufacturing as a technical area for its future roadmap. 19Beyond the ability to pattern at the nanoscale, metrology of patterned structures is a crucial capability in semiconductor device manufacturing that poses increasing challenges (e.g., cost, throughput, accuracy) as the device dimensions decrease. 20,21 For example, locating dislocations within a nanoscale BCP pattern requires tedious inspection of highresolution scanning electron micrographs. Likewise, common high-resolution imaging techniques used for characterization of DNA nanostructures, such as...

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Section: -10mentioning

confidence: 99%

Metrology of DNA arrays by super-resolution microscopy

et al. 2017

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“…Moreover, with the fact that DNA origami provides site‐specific docking sites for many nanomaterials, the spatially ordered DNA origami can be further utilized to create hierarchical order and complex patterns, such as large array of gold nanoparticles and fluorescence image of van Gogh's The Starry Night (Figure M). Similarly, DNA origami structures were used as masks for the construction of nanoscale pattern . This technique allows the transfer of spatial information of DNA origami, such as size and shape, into 2D nanomaterials pattern (Figure N).…”

Section: Fabrication Of Nanoscale Patterns On Dna Origamimentioning

confidence: 99%

Create Nanoscale Patterns with DNA Origami

Fan

Wang

Kenaan

et al. 2019

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Structural deoxyribonucleic acid (DNA) nanotechnology offers a robust platform for diverse nanoscale shapes that can be used in various applications. Among a wide variety of DNA assembly strategies, DNA origami is the most robust one in constructing custom nanoshapes and exquisite patterns. In this account, the static structural and functional patterns assembled on DNA origami are reviewed, as well as the reconfigurable assembled architectures regulated through dynamic DNA nanotechnology. The fast progress of dynamic DNA origami nanotechnology facilitates the construction of reconfigurable patterns, which can further be used in many applications such as optical/plasmonic sensors, nanophotonic devices, and nanorobotics for numerous different tasks.

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Section: Dna‐based Nanofabricationmentioning

confidence: 99%

“…For plasma‐based etching processes, a metal coating is often needed to improve the chemical stability of the DNA template itself (Figure A) . In contrast, HF‐vapor etching was reported to be compatible with unmodified DNA nanostructures, producing both positive‐ and negative‐tone patterns with resolutions down to sub‐10 nm scale (Figure C) …”

Section: Dna‐based Nanofabricationmentioning

confidence: 99%

DNA‐Based Nanofabrication: Pathway to Applications in Surface Engineering

Hui

Zhang

Deng

et al. 2019

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This Concept provides an overview of recent developments of DNA‐based nanofabrication and discusses its potential applications in the area of surface engineering. The first part of the paper discusses the strength and limitations of existing DNA‐based nanofabrication methods. The second part highlights several examples of surface engineering applications involving nano‐ and microscale surface textures. It finishes with a discussion of the opportunities and remaining challenges of applying DNA‐based nanofabrication in surface engineering applications.

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DNA Origami Mask for Sub-Ten-Nanometer Lithography

Cited by 53 publications

References 29 publications

Metrology of DNA arrays by super-resolution microscopy

Metrology of DNA arrays by super-resolution microscopy

Create Nanoscale Patterns with DNA Origami

DNA‐Based Nanofabrication: Pathway to Applications in Surface Engineering

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