Double-Sided Linear Iron-Core Fine-Tooth Motor for Low Acoustic Noise and High Acceleration

Yoon, Jun Young; Lang, Jeffrey H.; Trumper, David L.

doi:10.1109/tmech.2019.2929236

Cited by 33 publications

(10 citation statements)

References 39 publications

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“…Air‐core motor is a common driving device to support and control the movement in the Z ‐direction in the photolithography. The photolithography with an air‐core motor possesses the advantage of low vibrations, low acoustic noise, high precision and low power loss 3–12 …”

Section: Linear Motormentioning

confidence: 99%

See 1 more Smart Citation

Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Song

Chen

Huo³

et al. 2021

Int Journal of Mech Sys Dyn

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As one of the most advanced and precise equipment in the world, a photolithography scanner is able to fabricate nanometer-scale devices on a chip. To realize such a small dimension, the optical system is the fundamental, but the mechanical system often becomes the bottleneck. In the photolithography, the exposure is a dynamic process. The accuracy and precision of the movement are determined by the mechanical system, which is even more difficult to control compared with the optical system. In the mechanical system, there are four crucial components: the reticle and wafer stages, the linear motor, the metrology system, and the control system. They work together to secure the reticle and substrate locating at the correct position, which determines the overlay and alignment performance in the lithography. In this paper, the principles of these components are reviewed, and the development history of the mechanical system is introduced.

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Section: Linear Motormentioning

confidence: 99%

“…Linear motors are applied to guide the movement, and make sure the stage moves in the correct direction, vertically or horizontally. Iron‐core and ironless linear motors are implemented for different applications, with respect to the cogging effect, thrust fluctuation, and dynamic response 3–12 …”

Section: Introductionmentioning

confidence: 99%

Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Song

Chen

Huo³

et al. 2021

Int Journal of Mech Sys Dyn

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“…These machines have been widely used both in civil and military fields due to their simple structure, high thrust density, and high reliability [1,2]. However, such motors also have the problem of vibration which has been now an important indicator to evaluate motor performance [3].…”

Section: Introductionmentioning

confidence: 99%

Modelling and analysis of electromagnetic vibration in long sheet secondary tubular linear induction motors

Zhang

et al. 2023

IET Electric Power Appl

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This paper aims to clarify the behaviour and mechanism of electromagnetic vibration in long sheet secondary tubular linear induction motors (LSS‐TLIMs). Firstly, the spatial and temporal characteristics of electromagnetic force acting in the stator are analysed. Secondly, based on the wave propagation method, an analytical model is established to calculate the vibration response of the stator, which is simplified as a finite cylindrical shell. The accuracy of the proposed model, as well as the rationality of the simplification, are verified by 3D FEM simulation. It is indicated that the electromagnetic vibration response of LSS‐TLIMs mainly depends on the “axial breathing mode” (ABM) and corresponding “modal participation factor”. Moreover, the influences of the spatial distribution of electromagnetic force and the structural dimensions on the vibration are investigated. Finally, the “static vibration test” is performed to validate the above analysis. It is concluded that, compared with a rotary motor, the low‐frequency vibration of LSS‐TLIMs can be easily controlled since the natural frequency of ABMs tends to be much higher than that of the circumferential mode.

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“…The magnetic field on one side of the 1D Halbach permanent magnet array is significantly enhanced due to the arrangement of permanent magnets and has good sinusoidal characteristics. Therefore, the 1D Halbach magnet array is widely applied in linear, planar, and other motors [ 3 , 4 , 5 , 6 , 7 , 8 ].…”

Section: Introductionmentioning

confidence: 99%

“…As we know, one permanent magnet can be regarded as a superposition of countless small pieces according to the superposition principle, so does the magnetic flux density of the permanent magnet. Therefore, the main cause of poor waveform is that the rectangular permanent magnet is used, such as in [ 1 , 2 , 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 , 13 , 14 ]. Though the trapezoidal magnet [ 11 ], the sinusoidal-edged magnet [ 12 ], and the skewed magnet [ 15 ] are applied in the motors, the top and bottom surfaces of permanent magnets are flat and the sinusoidal property of the magnetic field also deteriorates in the small air gap.…”

Section: Introductionmentioning

confidence: 99%

Design of a New 1D Halbach Magnet Array with Good Sinusoidal Magnetic Field by Analyzing the Curved Surface

Liu

Hou

et al. 2021

Sensors

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In the linear and planar motors, the 1D Halbach magnet array is extensively used. The sinusoidal property of the magnetic field deteriorates by analyzing the magnetic field at a small air gap. Therefore, a new 1D Halbach magnet array is proposed, in which the permanent magnet with a curved surface is applied. Based on the superposition of principle and Fourier series, the magnetic flux density distribution is derived. The optimized curved surface is obtained and fitted by a polynomial. The sinusoidal magnetic field is verified by comparing it with the magnetic flux density of the finite element model. Through the analysis of different dimensions of the permanent magnet array, the optimization result has good applicability. The force ripple can be significantly reduced by the new magnet array. The effect on the mass and air gap is investigated compared with a conventional magnet array with rectangular permanent magnets. In conclusion, the new magnet array design has the scalability to be extended to various sizes of motor and is especially suitable for small air gap applications.

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Double-Sided Linear Iron-Core Fine-Tooth Motor for Low Acoustic Noise and High Acceleration

Cited by 33 publications

References 39 publications

Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Modelling and analysis of electromagnetic vibration in long sheet secondary tubular linear induction motors

Design of a New 1D Halbach Magnet Array with Good Sinusoidal Magnetic Field by Analyzing the Curved Surface

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