DRIE Trenches and Full-Bridges for Improving Sensitivity of 2-D Micromachined Silicon Thermal Wind Sensor

Ye, Yizhou; Yi, Zhenxiang; Gao, Shixuan; Qin, Ming; Huang, Qing‐An

doi:10.1109/jmems.2017.2707558

Cited by 47 publications

(14 citation statements)

References 23 publications

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“…In contrast, wind measurement sensors are much cheaper and could be deployed around the wind field in distances of miles to provide information for previewing wind measurement. Several types of wind measurement sensors have been employed by researchers, including cup anemometers [15][16][17], thermal anemometers [18][19][20], and ultrasonic anemometers [21][22][23]. However, measurements from cup anemometers often suffer from errors caused by wear and tear on the internal rotating bearings, and frequent inspection or calibration is required to ensure measurement accuracy [24,25].…”

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confidence: 99%

Three-Dimensional Wind Measurement Based on Ultrasonic Sensor Array and Multiple Signal Classification

Teng

Zhu

et al. 2020

Sensors

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The wind power industry continues to experience rapid growth worldwide. However, the fluctuations in wind speed and direction complicate the wind turbine control process and hinder the integration of wind power into the electrical grid. To maximize wind utilization, we propose to precisely measure the wind in a three-dimensional (3D) space, thus facilitating the process of wind turbine control. Natural wind is regarded as a 3D vector, whose direction and magnitude correspond to the wind's direction and speed. A semi-conical ultrasonic sensor array is proposed to simultaneously measure the wind speed and direction in a 3D space. As the ultrasonic signal transmitted between the sensors is influenced by the wind and environment noise, a Multiple Signal Classification algorithm is adopted to estimate the wind information from the received signal. The estimate's accuracy is evaluated in terms of root mean square error and mean absolute error. The robustness of the proposed method is evaluated by the type A evaluation of standard uncertainty under a varying signal-to-noise ratio. Simulation results validate the accuracy and anti-noise performance of the proposed method, whose estimated wind speed and direction errors converge to zero when the SNR is over 15 dB.Sensors 2020, 20, 523 2 of 16 turbines, which further maximizes wind utilization efficiency [10]. In addition, wind measurement can be used to estimate the corresponding power generation, thus contributing to the system scheduling and energy dispatching, and, ultimately, the integration of wind power in the grid [11]. In summation, precise wind speed and direction measurements in a 3D space are of vital importance to wind energy utilization and the wind power industry.Light detection and ranging (LIDAR) technology is one of the most popular wind measurements [12]. However, LIDAR can only measure the wind speed component along the line of sight, a disadvantage known as "the Cyclops dilemma" [13,14]. Therefore, the wind distribution measurement in a 3D space would require the very costly installment and deployment of several LIDARs in the wind farm. In contrast, wind measurement sensors are much cheaper and could be deployed around the wind field in distances of miles to provide information for previewing wind measurement. Several types of wind measurement sensors have been employed by researchers, including cup anemometers [15][16][17], thermal anemometers [18][19][20], and ultrasonic anemometers [21][22][23]. However, measurements from cup anemometers often suffer from errors caused by wear and tear on the internal rotating bearings, and frequent inspection or calibration is required to ensure measurement accuracy [24,25]. The performance of cup anemometers can also be affected by the measuring environment. For example, cup anemometers are prone to jamming in humid environments, since water vapor can penetrate their bearings [26]. Thermal anemometers also have difficulties coping with harsh environments. In addition, their sensitivity to changes in the velocity f...

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confidence: 99%

Three-Dimensional Wind Measurement Based on Ultrasonic Sensor Array and Multiple Signal Classification

Teng

Zhu

et al. 2020

Sensors

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“…(D) Schematic view of a calorimetric airflow sensor chip integrated with a metal finger head placed in a tube [92]. (E) Schematic showing an equivalent circuit of a silicon-based thermal wind sensor composed of eight symmetric thermoresistors arranged in two Wheatstone full-bridges [94]. (F) Schematic presentation of a sensing array mechanism, 3-D structure and experimental design of three-mode biocompatible liquid sensing system based on parylene membrane [78].…”

Section: Silicon-based Hot-wire/film Mems Thermal Flow Sensorsmentioning

confidence: 99%

“…Measurements showed a temperature difference between upstream and downstream sensing elements of 38.6 K for flow velocity of 3 m/s. In [94] an innovative strategy was used to improve the efficiency of thermal wind sensors. This was based on fabrication of trenches on a silicon substrate by deep reactive ion etching (DRIE) [94].…”

Section: Metallic-based Calorimetric Mems Thermal Flow Sensorsmentioning

confidence: 99%

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Design and applications of MEMS flow sensors: A review

Ejeian

Azadi

Razmjou

et al. 2019

Sensors and Actuators A: Physical

301

125

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“…After that, two sensors were placed in two orthogonal directions to realise wind speed and direction simultaneously [3,4]. Since then, many groups all over the world presented MEMS thermal wind sensors with improved sensitivity, reduced power consumption and extended measuring dynamic range [5][6][7][8]. In addition, sometimes, force pressure caused by wind is utilised as a measure for wind speed in several groups.…”

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confidence: 99%

Differential piezoresistive wind speed sensor on flexible substrate

Zhao

Qin

et al. 2020

Electron. lett.

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In this Letter, a differential piezoresitive wind speed sensor on a flexible substrate is proposed. Two piezoresistors with the same size are fabricated on the front surface and back surface of the substrate, respectively. When the wind blows towards the device, the flexible substrate is bent, increasing the resistance on the front surface and reducing that on the back surface. The proposed sensor is fabricated on a polyethylene terephthalate substrate. Wind speed experiments are performed in the wind tunnel and the results demonstrate that the sensor can measure the wind speed up to about 20 m/s.

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DRIE Trenches and Full-Bridges for Improving Sensitivity of 2-D Micromachined Silicon Thermal Wind Sensor

Cited by 47 publications

References 23 publications

Three-Dimensional Wind Measurement Based on Ultrasonic Sensor Array and Multiple Signal Classification

Three-Dimensional Wind Measurement Based on Ultrasonic Sensor Array and Multiple Signal Classification

Design and applications of MEMS flow sensors: A review

Differential piezoresistive wind speed sensor on flexible substrate

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