2013
DOI: 10.1002/rcm.6749
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Dual‐beam versus single‐beam depth profiling: Same sample in same instrument

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Cited by 3 publications
(1 citation statement)
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“…The test samples were depth profiled using a time-offlight SIMS instrument in the traditional single beam mode [11]. The 60 • oblique 5 kV Ar + ion beam was focused to a spot of 30 µm in diameter at a current of 80±8 nA as measured by in situ Faraday cup.…”
Section: General Description Of the Imager Imaging And Measurement Ementioning
confidence: 99%
“…The test samples were depth profiled using a time-offlight SIMS instrument in the traditional single beam mode [11]. The 60 • oblique 5 kV Ar + ion beam was focused to a spot of 30 µm in diameter at a current of 80±8 nA as measured by in situ Faraday cup.…”
Section: General Description Of the Imager Imaging And Measurement Ementioning
confidence: 99%