In this work, a new RF power trench-gate multi-channel laterally-diffused MOSFET (TGMC-LDMOS) on InGaAs is proposed. The gate-electrodes of the new structure are placed vertically in the trenches built in the drift layer. Each gate results in the formation of two channels in the p-body region of the device. The drain metal is also placed in a trench to take contact from the n+-InGaAs region located over the substrate. In a cell length of
, the TGMC-LDMOS structure has seven channels, which conduct simultaneously to carry drain current in parallel. The formation of multi-channels in the proposed device increases the drive current (
leading to a large reduction in the specific on-resistance (
. Due to better control of gates on the drain current, the new structure exhibits substantially higher transconductance (
resulting in significant improvement in cut-off frequency (
and oscillation frequency (
. Using two-dimensional numerical simulations, a 55 V TGMC-LDMOS is demonstrated to achieve 7 times higher
, 6.2 times lower
, 6.3 times higher peak
, 2.6 times higher
, and 2.5 times increase in
in comparison to a conventional device for the identical cell length.