Dual frequency MEMS resonator through mixed electrical and mechanical coupling scheme

Morankar, Amol; Patrikar, Rajendra M.

doi:10.1049/iet-cds.2017.0250

Cited by 4 publications

(3 citation statements)

References 34 publications

(43 reference statements)

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“…To analyze and simulate the whole test system, it is necessary to determine the electrical parameters such as resistance, capacitance, and inductance according to the resonator parameters shown in Table 1. The relationship between electrical parameters such as resistance, capacitance, and inductance and resonator parameters in the equivalent circuit model is as follows [37]:…”

Section: Calculation Of Equivalent Circuit Model Parametersmentioning

confidence: 99%

A Precise Closed-Loop Controlled ZnO Nanowire Resonator Operating at Room Temperature

Cai

2022

Micromachines

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To realize the real-time measurement of masses of nanoparticles, virus molecules, organic macromolecules, and gas molecules, and to analyze their physical and chemical properties, a ZnO nanowire (NW) resonator operating at room temperature with an ultrahigh resonant frequency, real-time detection, and high precision was designed and developed in this study. The machining method is simple and easy to integrate into an integrated circuit. A closed-loop detection system based on a phase-locked loop (PLL) and frequency modulation technology (FM) was used to perform closed-loop testing of electromagnetically excited ZnO NW. The first-order resonance frequency of the resonator was 10.358 MHz, the quality factor Q value was about 600, the frequency fluctuation value fRMS was about 300 Hz, and the FM range could reach 200 kHz. The equivalent circuit model of the resonator was established, the parasitic parameters during the test were obtained, and the frequency accuracy and phase noise of the resonator were analyzed and tested. The experimental results show that the closed-loop system can automatically control the resonator in a wide range of frequency bands, with good tracking performance of the resonant frequency, small frequency fluctuation, and low phase noise level.

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Section: Calculation Of Equivalent Circuit Model Parametersmentioning

confidence: 99%

A Precise Closed-Loop Controlled ZnO Nanowire Resonator Operating at Room Temperature

Cai

2022

Micromachines

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“…Filter banks have also been proposed for channel selection [12,13] and hearing aids [14]. Filters can be electrostatically tuned [15][16][17][18][19], and mechanical coupling between elements can be replaced by electrostatic coupling [20][21][22] or a mixture of the two [23,24]. Methods have been developed to fabricate nanoscale coupling elements [25][26][27][28] and electrode gaps [29][30][31], CMOS integration has been demonstrated [32,33], and alternatives to simple linear arrangements have been proposed [34][35][36][37].…”

Section: Introductionmentioning

confidence: 99%

MEMS Electrostatically Driven Coupled Beam Filter Banks

Syms,

Bouchaala

2023

Micromachines

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MEMS bandpass filters based on electrostatically driven, mechanically coupled beams with in-plane motion have been demonstrated up to the VHF band. Filters higher than second order with parallel plate drives have inherent tuning difficulties, which may be resolved by adding mass-loaded beams to the ends of the array. These beams deflect for DC voltages, and thus allow synchronized electrostatic tuning, but do not respond to in-band AC voltages and hence do not interfere with dynamic synchronization. Additional out-of-band responses may be damped, leaving the desired response. The principle is extended here to close-packed banks of filters, with adjacent arrays sharing mass-loaded beams that localize modes to sub-arrays. The operating principles are explained using a lumped element model (LEM) of the equations of motion in terms of resonant modes and the reflection of acoustic waves at discontinuities. Performance is simulated using the LEM and verified using the more realistic stiffness matrix method (SMM) for banks of up to eight filters. Similar or dissimilar filters may be combined in a compact arrangement, and the method may be extended to higher order resonances and alternative coupled resonator systems.

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“…Since high Q filtering is more required in ultra-high frequency and higher frequency ranges, disk resonators are mostly addressed in this paper according to their inherent extremely high stiffness while having a small size and therefore small effective mass which leads to achieving frequencies in GHz range [24][25][26][27]. Amongst various developed MEMS resonators, ring shape anchored contour mode disk resonator achieved great deals of interest.…”

Section: Introductionmentioning

confidence: 99%