Dual-mode micromirrors for optical phased array applications

Krishnamoorthy, Uma; Li, K.; Yu, Kun-Ming; Lee, D.; Heritage, J. P.; Solgaard, Olav

doi:10.1016/s0924-4247(01)00814-7

Cited by 62 publications

(14 citation statements)

References 6 publications

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“…The phase tuner can either actively emit light with different phase, or passively transmit or reflect incoming light while modifying its transmission phase or reflection phase. Several phase tuning mechanisms have been demonstrated for optical phased arrays, such as using electro-mechanical [83,84], electro-optic [85][86][87][88], thermooptic [89,90] effect. The liquid crystal represents the most mature technology; however its response time is very slow, typically in the order of hundreds of Hz to tens of kHz [85][86][87].…”

Section: Chapter 4 High Contrast Grating Optical Phased Arraymentioning

confidence: 99%

High-contrast gratings for integrated optoelectronics

Chang-Hasnain¹,

Yang²

2012

Adv. Opt. Photon.

478

171

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Integrated optoelectronics has seen its rapid development in the past decade. From its original primary application in long-haul optical communications and access network, integrated optoelectronics has expanded itself to data center, consumer electronics, energy harness, environmental sensing, biological and medical imaging, industry manufacture control etc. This revolutionary progress benefits from the advancement in light generation, manipulation, detection and its interaction with other systems. Device innovation is the key in this advancement. Together they build up the component library for integrated optoelectronics, which facilities the system integration.High contrast grating (HCG) is an emerging element in integrated optoelectronics. Compared to the other elements, HCG has very rich properties and design flexibility. Some of them are fascinating and extraordinary, such as broadband high reflectivity, and high quality factor resonance -all it needs is a single thin-layer of HCG. Furthermore, it can be a microelectromechanical structure. These rich properties are readily to be harnessed and turned into novel devices.This dissertation is devoted to investigate the physical origins of the extraordinary features of HCG, and explore its applications in novel devices for integrated optoelectronics. An intuitive picture will be presented to explain the HCG physics. The essence of HCG lies in its superb manipulation of light, which can be coupled to applications in light generation and detection. Various device innovations, such as lowloss hollow-core waveguide, fast optical phased array, tunable VCSEL and detector are demonstrated with the HCG as a key element. This breadth of functionality of HCG suggests that HCG has reached beyond a single element in integrated optoelectronics; it has enabled a new platform for integrated optoelectronics.

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Section: Chapter 4 High Contrast Grating Optical Phased Arraymentioning

confidence: 99%

High-contrast gratings for integrated optoelectronics

Chang-Hasnain¹,

Yang²

2012

Adv. Opt. Photon.

478

171

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“…The working principles and design considerations of MEMS micromirrors have also been analyzed in details [5]- [6]. Furthermore, dual-mode micro-mirrors which can work in both piston and torsional modes have been reported [7]- [8]. Dual-mode micro-mirrors offers more flexibility in light modulation.…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization of Piezoelectric Dual-Mode Micro-Mirror

Zhong

Xiong

Yao

et al. 2010

Technological Developments in Networking, Education and Automation

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Abstract-MEMS micro-mirrors have been widely used in optical communication, projection display, and microscanner, etc. Various MEMS micro-mirror devices have been reported. In this paper, the design of a bulkmicromachined MEMS piezoelectric dual-mode micromirror is proposed. The working principle of the dualmode micro-mirror device is analyzed. Based on the analysis, a set of optimized design parameters of the micro-mirror is suggested. Theoretical analysis shows that the proposed micro-mirror can deflect for a maximum displacement of 2.5μm in its piston mode, and tilt for a maximum angle of 4.88º in its torsional mode. The fabrication flow of the MEMS micro-mirror is also suggested. The proposed micro-mirror has the advantages of large displacement and large tilt angle due to piezoelectric activation. The PZT actuated micromirror (PAM) also leads to improved linearity in tilting angle and piston displacement. Further, fast response of the PZT unimorph on the applied actuation voltage ensures wider operation bandwidth of the PAM in contrast to thermal activated micro-mirrors.

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“…T HE recent focus of the MEMS world on optical applications of micromachined devices has pushed the field out of surface micromachining technology [1]- [7]. This is mainly due to the need for optically very flat and smooth structures, as well as due to the desire for large deflections and large actuation forces available using high aspect-ratio micromachining.…”

Section: Introductionmentioning

confidence: 99%

“…Particularly of interest is providing 1DoF (or single-axis) and 2DoF (two-axis) rotation of micromirrors. There is also demand for micromirrors with independently controlled rotation and pistoning motion [7].…”

Section: Introductionmentioning

confidence: 99%

“…Vertically staggered SOI combdrives perform well for single-sided rotation applications [8], [9], [16] and demonstrate advantages of SOI-MEMS with respect to surface-micromachined examples of vertical comb drives [5]- [7]. However, in these previous SOI-MEMS processes, no isolation is available between combdrive fingers in either upper or lower combdrives, limiting devices to one-sided rotation.…”

Section: Introductionmentioning

confidence: 99%

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Multilevel beam SOI-MEMS fabrication and applications

Milanović

9th International Conference on Electronics, Circuits and Systems

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Abstract-A microfabrication technology has been developed and demonstrated, which enhances the capabilities and applications of high aspect ratio silicon-on-insulator microelectromechanical systems (SOI-MEMS) by enabling additional independent degrees of freedom of operation: both upward and downward vertical pistoning motion as well as bi-directional rotation. This is accomplished by applying multiple-mask high aspect ratio etches from both the front-and back-side of the SOI device layer, forming beams at different levels. The processes utilize four masks, two for front-side and two for back-side etching. As a result, single-crystal silicon beams with four different cross-sections are fabricated, and can be combined to form many additional beam cross-sections. This provides a wide variety of possible mechanical designs that can be optimized for optical and other applications. By this methodology, unique high aspect ratio micromirror devices were demonstrated with fully isolated and accurately self-aligned vertical combdrives in the SOI device layer, with initial combfinger overlap. Examples of fabricated devices are shown with performance summaries.[886]Index Terms-Deep reactive ion etch (DRIE), inductively coupled plasma (ICP) etch, microfabrication, micromirrors, optical MEMS, self-alignment, SOI-MEMS, vertical combdrives.

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Dual-mode micromirrors for optical phased array applications

Cited by 62 publications

References 6 publications

High-contrast gratings for integrated optoelectronics

High-contrast gratings for integrated optoelectronics

Design and Optimization of Piezoelectric Dual-Mode Micro-Mirror

Multilevel beam SOI-MEMS fabrication and applications

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