1966
DOI: 10.1063/1.1720005
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Durable Chromium Masks for Photoresist Applications

Abstract: Articles you may be interested inPhotoresist cross-sectioning with negligible damage using a dual-beam FIB-SEM: A high throughput method for profile imaging Fabrication of a nanosize metal aperture for a near field scanning optical microscopy sensor using photoresist removal and sputtering techniques

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