2001
DOI: 10.1046/j.1365-2818.2001.00911.x
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Dynamic chemical mapping near a Si/SiO2 interface at elevated temperatures using plasmon‐loss images

Abstract: Plasmon‐loss imaging was applied to chemical mapping during an in‐situ heating experiment. The technique was applied to observation of vibration of a Si/SiO2 interface which took place during reduction of SiO2 at high temperature. The chemical maps of Si and SiO2 were recorded dynamically using a conventional TV‐VTR system at a time resolution of 1/30 s.

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Cited by 6 publications
(2 citation statements)
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“…The latter component gives another broad contribution peaked at around 46 eV due to the double plasmon loss in SiO 2 . 37 The remaining components are related to the inter-band transitions of the Ge-SiO 2 hetero-structure (5-10 eV range) and to the broad M 4,5 ionization edge of Ge QD, starting at around 29 eV. This latter contribution gives important information on the chemical arrangement at the interface of Ge QDs.…”
Section: Resultsmentioning
confidence: 99%
“…The latter component gives another broad contribution peaked at around 46 eV due to the double plasmon loss in SiO 2 . 37 The remaining components are related to the inter-band transitions of the Ge-SiO 2 hetero-structure (5-10 eV range) and to the broad M 4,5 ionization edge of Ge QD, starting at around 29 eV. This latter contribution gives important information on the chemical arrangement at the interface of Ge QDs.…”
Section: Resultsmentioning
confidence: 99%
“…In the case of thin films, different electron-based techniques have been used to study plasmon excitations. [2][3][4] One example is the electron energy-loss spectroscopy technique, 5 where the energy of the transmitted electrons is recorded. This technique, however, proved not to be well suited for experiments using energetic ions since the energy-loss spectrum of the transmitted ions stems from multiple scattering events, which mask the effect due to the plasmon excitations.…”
Section: Introductionmentioning
confidence: 99%