Dynamic fabrication of microfluidic systems for particles separation based on optical projection lithography

Sun, Lujing; Chu, Honghui; Yang, Rendi; Yu, Haibo

doi:10.1007/s10544-020-00535-y

Cited by 13 publications

(8 citation statements)

References 23 publications

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“…Noteworthy, beyond the final application, the role of the vertical wall roughness and texturing of the pillars on the assembly of the HUVECs is very intriguing, by comparison with pillars of similar size produced by traditional optical lithography. Indeed, optical lithography allows the realization of polymeric or inorganic pillars of rectangular and cylindrical shape with nanometer-scale roughness [ 108 , 109 ] that may influence the 3D self-assembly of HUVECs and the expression of the ZO-1 protein, indicating the presence of TJs. The presence of micro- and nano-textured surface topography is known to promote both adhesion and proliferation of HUVECs [ 110 ].…”

Section: Resultsmentioning

confidence: 99%

Potential of CO2-laser processing of quartz for fast prototyping of microfluidic reactors and templates for 3D cell assembly over large scale

Perrone

Cesaria

Zizzari

et al. 2021

Materials Today Bio

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Carbon dioxide (CO 2 )-laser processing of glasses is a versatile maskless writing technique to engrave micro-structures with flexible control on shape and size. In this study, we present the fabrication of hundreds of microns quartz micro-channels and micro-holes by pulsed CO 2 -laser ablation with a focus on the great potential of the technique in microfluidics and biomedical applications. After discussing the impact of the laser processing parameters on the design process, we illustrate specific applications. First, we demonstrate the use of a serpentine microfluidic reactor prepared by combining CO 2 -laser ablation and post-ablation wet etching to remove surface features stemming from laser-texturing that are undesirable for channel sealing. Then, cyclic olefin copolymer micro-pillars are fabricated using laser-processed micro-holes as molds with high detail replication. The hundreds of microns conical and square pyramidal shaped pillars are used as templates to drive 3D cell assembly. Human Umbilical Vein Endothelial Cells are found to assemble in a compact and wrapping way around the micro-pillars forming a tight junction network. These applications are interesting for both Lab-on-a-Chip and Organ-on-a-Chip devices.

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Section: Resultsmentioning

confidence: 99%

Potential of CO2-laser processing of quartz for fast prototyping of microfluidic reactors and templates for 3D cell assembly over large scale

Perrone

Cesaria

Zizzari

et al. 2021

Materials Today Bio

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“…However, its shape affected the capture efficiency. 18 Cheng et al 19 developed a simple and low-cost nucleic acid quantification method based on the microcolumn array chip. The adsorption area of the microcolumn was small, resulting in low capture efficiency and sensitivity.…”

Section: Introductionmentioning

confidence: 99%

Non-invasive detection of bladder cancer via microfluidic immunoassay of the protein biomarker NMP22

Guan

Chen

et al. 2023

Anal. Methods

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“…On one side, some techniques focused on using hot embossing 4 , micro-milling 5 , micro-injection molding 6 , etc. to fabricate devices out of an alternative thermoplastic material such as thermoplastic materials such as polymethyl methacrylate (PMMA) 7 , cyclic olefin copolymer (COC) 8 or polycarbonate (PC) 9 while others focused on replacing the conventional mold making process still keeping the PDMS as the base material for replication such as wax-printing 10 , laser-jet printing 11 , 3D printing 12,13 , tonerprinting 14 , femtosecond laser 15 , two photon polymerization (2PP) 16 , digital micromirror devices (DMD) 17,18 , direct laser writing (DLW) 19,20 , electron-beam lithography (EBL) 21,22 , ion-beam etching (IBE) 23,24 , etc. Moreover, most of them fail to bridge the balance between the minimum feature size and cost.…”

Section: Introductionmentioning

confidence: 99%

Rapid Prototyping of High-resolution Large Format Microfluidic Device Through Maskless Image Guided In-situ Photopolymerization

Paul

Zhao

Coster

et al. 2022

Preprint

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Microfluidic devices have been widely used in mechanical, biomedical, chemical, and materials research. As a result, it is becoming increasingly important to have a cheap, fast, and reliable method for rapid microfabrication. However, prototyping of microfluidic devices typically suffers from the high initial cost, low resolution, rough surface finish, and long turn-around time. Here we present a strategic approach to closed-loop control of deterministic fabrication process based on in-situ image analysis called image-guided in-situ maskless lithography (IGIs-ML). Using the closed-loop control along with flush-flow functionality and leveraging the swelling behavior of the photocurable polymer, we demonstrate the fabrication of sub-micron high aspect ratio channels (800 nm width and >10 µm height) close to the light diffraction limit. This outperforms any reported rapid prototyping platforms which can typically reach tens of µm in channel width. Such dimensional capability is even comparable to some of the most advanced fabrication methods currently available. Dynamic image analysis simultaneously provides superior repeatability of densely packed patterns across a large area and multiple devices. A general and robust approach is established to fabricate a wide variety of microfluidic devices. This resolves the critical over-curing issues and size limitations in rapid prototyping of microfluidic devices, enabling affordable and reliable exploration of design space beyond the resolution of traditional photolithography.

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Dynamic fabrication of microfluidic systems for particles separation based on optical projection lithography

Cited by 13 publications

References 23 publications

Potential of CO2-laser processing of quartz for fast prototyping of microfluidic reactors and templates for 3D cell assembly over large scale

Potential of CO2-laser processing of quartz for fast prototyping of microfluidic reactors and templates for 3D cell assembly over large scale

Non-invasive detection of bladder cancer via microfluidic immunoassay of the protein biomarker NMP22

Rapid Prototyping of High-resolution Large Format Microfluidic Device Through Maskless Image Guided In-situ Photopolymerization

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