2018
DOI: 10.1109/tpel.2017.2734678
|View full text |Cite
|
Sign up to set email alerts
|

Dynamic Matching System for Radio-Frequency Plasma Generation

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
10
0

Year Published

2019
2019
2024
2024

Publication Types

Select...
8
1

Relationship

2
7

Authors

Journals

citations
Cited by 44 publications
(10 citation statements)
references
References 13 publications
0
10
0
Order By: Relevance
“…In this context, the primary purpose of a TMN block is to present an impedance that is suitable for the inverter and power combining system (e.g., Z L in Fig. 4(a)); several such suitable TMNs have been reported in the literature [6], [7], [33]- [36]. The next two subsections outline two dc-torf architectures demonstrating the usefulness of multiple power control schemes in achieving fast and efficient wide-powerand wide-load-range operation at HF, and present supporting simulation results.…”
Section: Variable-load High Efficiency Dc-to-rf System Architecturesmentioning
confidence: 99%
“…In this context, the primary purpose of a TMN block is to present an impedance that is suitable for the inverter and power combining system (e.g., Z L in Fig. 4(a)); several such suitable TMNs have been reported in the literature [6], [7], [33]- [36]. The next two subsections outline two dc-torf architectures demonstrating the usefulness of multiple power control schemes in achieving fast and efficient wide-powerand wide-load-range operation at HF, and present supporting simulation results.…”
Section: Variable-load High Efficiency Dc-to-rf System Architecturesmentioning
confidence: 99%
“…To demonstrate the effectiveness of phase-switched impedance modulation for implementing tunable impedance matching, we have developed a TMN design based on an impedance step-up L-section matching network with electronically-variable effective impedances. Such a network configuration is suitable for plasma drive applications where the driving-point impedance of an RF plasma-excitation coil must often be stepped-up and matched to the output impedance of a power amplifier PA (e.g., see [17] for a plasma matching system at similar power levels). A power amplifier is thus connected at the IN terminal, and the plasma load is connected at the OUT terminal, with the TMN serving to match the variable plasma load impedance to the 50 Ω load desired for the PA. As Fig.…”
Section: Tunable Impedance Matching Network Designmentioning
confidence: 99%
“…Dynamic component tuning and impedance matching have application to a diverse range of radio-frequency (RF) power applications, including software-defined radios [1], frequencyagile and adaptive RF transmitters and receivers [2], [3], new types of highly-efficient RF power amplifiers [4], plasma drivers [17], generators [5], [6], wireless power transfer [7,19,20], power converters [14] and many other industrial processes. Electronically-controlled tunable impedance matching networks (TMNs) in particular can be valuable in many RF applications.…”
Section: Introductionmentioning
confidence: 99%
“…During the matching process, a load impedance range (Z = R + jX), composed of both resistive part and reactive parts, is required to prevent power losses. In theory, the voltage-current relationships for a lossless two-port network can be written as follows [39]:…”
Section: Hydrogen Dilution Ratio Impact On the Matching Networkmentioning
confidence: 99%