Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm

Chen, Liang-Chia; Huang, Yao‐Ting; Nguyen, Xuan-Loc; Chen, Jinliang; Chang, Chung-Chu

doi:10.1016/j.optlaseng.2008.05.016

Cited by 28 publications

(21 citation statements)

References 8 publications

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“…Therefore the shortest pulse created by the combined source is limited to 18.8 ns. This is shorter than the shortest pulses created by phosphor based LEDs [2,10]. The maximum frequency of stroboscopic measurements using 10 % duty cycle is 5.4 MHz.…”

Section: Pulsingmentioning

confidence: 83%

“…LEDs are replacing halogen lamps as light sources for scanning white light interferometers (SWLI) because they are compact, produce little heat, have long lifetime over which their spectrum does not change, and they can be pulsed allowing stroboscopic illumination without choppers or other additional moving devices [1][2][3]. In most applications phosphor-based white LEDs are favored because they feature a short coherence length and broad spectrum [1].…”

Section: Introductionmentioning

confidence: 99%

“…Single color LEDs on the other hand typically emit a nearly Gaussian spectrum and can be pulsed at a few MHz [2,3] but their coherence lengths are long. By combining several LEDs a wide bandwidth can be achieved.…”

Section: Introductionmentioning

confidence: 99%

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Non-phosphor white LED light source for interferometry

et al. 2011

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Solid state light sources are replacing a tungsten filament based bulbs in Scanning White Light Interferometers. White LEDs generate little heat, feature short switching times, and have long lifetimes. Phosphor-based white LEDs produce a wide spectrum but have two separate peaks which cause interferogram ringing. This makes measuring multi layered structures difficult and may degrade measurement precision even when measuring a single reflecting surface. Most non phosphor white LEDs exhibit a non Gaussian spectrum, but multi-LED based white LEDs can achieve switching times and stability similar to those of single color LEDs. By combining several LEDs and by controlling their input current independently it is possible to create almost an arbitrary spectrum.We designed a new light source by combining a non phosphor white LED (American Opto Plus LED, L-513NPWC-15D) and single color LEDs. This allowed us to fill the spectral gap between the blue and yellow peaks of the non phosphor white LED. By controlling the input current of the LEDs individually a nearly Gaussian shaped spectrum was achieved. This wide continuous spectrum creates short interferograms (FWHM ~1.4 µm) without side peaks. To demonstrate the properties of this source we measured through a 5 µm thick polymer film. The well localized interference created by the source allows measuring both surfaces of thin films simultaneously. We were able to pulse the source at 5.4 MHz.

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Section: Pulsingmentioning

confidence: 83%

Section: Introductionmentioning

confidence: 99%

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Non-phosphor white LED light source for interferometry

et al. 2011

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“…Scanning laser interferometry [6][7][8][9], capable of detecting (sub)picometer vibration amplitudes, has dominated the characterization of high-frequency electromechanical devices, for which the typical maximum amplitudes are below 1 nm and the operation frequencies can extend up to several GHz. The widespread use of silicon-based MEMS resonators with their typical operation frequencies ranging from sub-kHz to several tens of MHz and with their maximum out-of-plane vibration amplitudes of even up to several micrometers has raised an interest in utilizing stroboscopic white-light interferometry (SWLI) for device characterization [10][11][12]. The SWLI technique is particularly interesting as it readily enables unambiguous detection of vibrations with amplitudes greater than the fringe period of the interferometric signal.…”

Section: Introductionmentioning

confidence: 99%

Characterization of surface acoustic waves by stroboscopic white-light interferometry

Kokkonen¹,

Lipiäinen²,

Shavrin³

et al. 2015

Opt. Express

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We present phase-sensitive absolute amplitude measurements of surface acoustic wave fields obtained using a stroboscopic white-light interferometer. The data analysis makes use of the high resolution available in the measured interferometric phase data, enabling the characterization of the out-of-plane surface vibration fields in electrically excited microstructures with better than 100 pm amplitude resolution. The setup uses a supercontinuum light source with tailored spectral properties for obtaining the high amplitude resolution. The duration of the light pulses is less than 300 ps to allow the detection of high frequencies. These capabilities enabled a detailed measurement of the focusing of surface acoustic waves by an annular interdigital transducer structure operating at 74 MHz, featuring a maximum vibration amplitude of 3 nm.

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“…Dynamic 3D shape measurement as seen from current literature is mainly limited to measurement of diffuse objects. Su and Zhang review the development of dynamic 3D shape measurement in recent years [123,124,[150][151][152][153]. Zhang [23,28] proposed a real-time 3D shape measurement system with phase shifted digital fringe projection technique for diffuse objects, which utilizes a color wheel-removed digital light processing projector as the structured light source and accelerates the processing by a graphics processing unit.…”

Section: Fast Frd and Its Application In Dynamic 3d Sensing Of Speculmentioning

confidence: 99%

Advances in 3D optical profilometry

Huang¹

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Dynamic out-of-plane profilometry for nano-scale full-field characterization of MEMS using stroboscopic interferometry with novel signal deconvolution algorithm

Cited by 28 publications

References 8 publications

Non-phosphor white LED light source for interferometry

Non-phosphor white LED light source for interferometry

Characterization of surface acoustic waves by stroboscopic white-light interferometry

Advances in 3D optical profilometry

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