Dynamic precision reliability analysis for six degrees of freedom micro-displacement mechanism of reticle stage in lithography machine based on Monte-Carlo

Luo, Dashuang; Wang, Kesheng; Zhang, Longlong; Li, Jing; Wang, Zhonglai; Huang, Hong‐Zhong

doi:10.1109/qr2mse.2013.6625576

Cited by 3 publications

(9 citation statements)

References 3 publications

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“…With the modeling of dynamic error based on the global coordinate system and the modeling of dynamic precision reliability, the motor error data have been recorded during the motor performance test and are given in Figures 27–30. It is noted that the blue star points are output error data while the dashed line is the corresponding normal distribution 79 . The experimental results show the output errors obey normal distribution in each direction.…”

Section: Control Of Overlaymentioning

confidence: 95%

Section: Control Of Overlaymentioning

confidence: 99%

“…74,75 Thus, the theories of reliability analysis based on structural statics and dynamics [76][77][78] are investigated, to achieve better dynamic performance and reliability assurance. For the study of dynamic precision reliability of 6 DOF micro displacement mechanism in the reticle stage, 79 79 The experimental results show the output errors obey normal distribution in each direction.…”

Section: Control Overlaymentioning

confidence: 99%

“…Reproduced with permission. 79 Copyright 2021, The Authors, published by IEEE square fitting method can be used to correct the periodic nonlinearity in the interferometer, 84 the analog circuitry method can be used to correct the two signals with quadrature phase-shift in real time, 85 and the Kalman filter method can be used to correct timevarying nonlinearity. 86,87 As a real-time correction method, Kalman filter includes the numerical model establishment of the homodyne detector and the extended filter design, so it can remove the timevarying nonlinearity error effectively.…”

Section: Control Overlaymentioning

confidence: 99%

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Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Song

Chen

Huo³

et al. 2021

Int Journal of Mech Sys Dyn

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As one of the most advanced and precise equipment in the world, a photolithography scanner is able to fabricate nanometer-scale devices on a chip. To realize such a small dimension, the optical system is the fundamental, but the mechanical system often becomes the bottleneck. In the photolithography, the exposure is a dynamic process. The accuracy and precision of the movement are determined by the mechanical system, which is even more difficult to control compared with the optical system. In the mechanical system, there are four crucial components: the reticle and wafer stages, the linear motor, the metrology system, and the control system. They work together to secure the reticle and substrate locating at the correct position, which determines the overlay and alignment performance in the lithography. In this paper, the principles of these components are reviewed, and the development history of the mechanical system is introduced.

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Section: Control Of Overlaymentioning

confidence: 95%

Section: Control Of Overlaymentioning

confidence: 99%

Section: Control Overlaymentioning

confidence: 99%

Section: Control Overlaymentioning

confidence: 99%

See 2 more Smart Citations

Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Song

Chen

Huo³

et al. 2021

Int Journal of Mech Sys Dyn

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“…Briot considered the effects of errors, conducted a detailed theoretical analysis of the 3T1R parallel manipulator, and established the maximum position and maximum orientation error model [6]. Luo established the dynamic error model of a 6-DOF parallel micromanipulator and studied the dynamic accuracy reliability of the mechanism by the Monte Carlo method [7]. Li studied the kinematic accuracy reliability of a 3-DOF 3-PRR parallel manipulator based on the PZT vibration control system.…”

Section: Introductionmentioning

confidence: 99%

Analysis of the Kinematic Accuracy Reliability of a 3-DOF Parallel Robot Manipulator

Cui

Zhang

et al. 2015

International Journal of Advanced Robotic Systems

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Kinematic accuracy reliability is an important performance index in the evaluation of mechanism quality. By using a 3-DOF 3-PUU parallel robot manipulator as the research object, the position and orientation error model was derived by mapping the relation between the input and output of the mechanism. Three error sensitivity indexes that evaluate the kinematic accuracy of the parallel robot manipulator were obtained by adapting the singular value decomposition of the error translation matrix. Considering the influence of controllable and uncontrollable factors on the kinematic accuracy, the mathematical model of reliability based on random probability was employed. The measurement and calculation method for the evaluation of the mechanism's kinematic reliability level was also provided. By analysing the mechanism's errors and reliability, the law of surface error sensitivity for the location and structure parameters was obtained. The kinematic reliability of the parallel robot manipulator was statistically computed on the basis of the Monte Carlo simulation method. The reliability analysis of kinematic accuracy provides a theoretical basis for design optimization and error compensation.

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Research on parametric modelling method of aero-engine guide vane adjustment mechanism of variable geometry turbine reflecting dimensional uncertainty

Zhou¹,

Li²,

Xie³

et al. 2022

Fifth International Conference on Mechatronics and Computer Technology Engineering (MCTE 2022)

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Aiming at the problem of low control accuracy of aero-engine kinematics, the multidisciplinary coupled dynamics simulation method and reliability modelling method are studied. In this paper, based on the ADAMS software platform, the parametric modelling is proposed for aero-engine guide vane adjustment mechanism of variable geometry turbine, and the parametric model is simulated. The equation of motion for the mechanism is established based on MATLAB and is theoretically analysed and verified. The result is consistent with the theoretical analysis result, which verifies the correctness of the mathematical model and the simulation model. The dimensional uncertainty caused by machining errors and the effect of component deformation caused by external loads on the vane motion accuracy are considered in this paper. Through the simulation analysis, the key factors affecting the vane motion accuracy can be identified, providing guidance for the establishment of the reliability model. Finally, the reliability of the vane rotation angle is calculated by Monte Carlo method. The method proposed in this paper can be used to improve the reliability design and optimize the structure of the guide vane adjustment mechanism of variable geometry turbine.

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Dynamic precision reliability analysis for six degrees of freedom micro-displacement mechanism of reticle stage in lithography machine based on Monte-Carlo

Cited by 3 publications

References 3 publications

Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Mechanical system and dynamic control in photolithography for nanoscale fabrication: A critical review

Analysis of the Kinematic Accuracy Reliability of a 3-DOF Parallel Robot Manipulator

Research on parametric modelling method of aero-engine guide vane adjustment mechanism of variable geometry turbine reflecting dimensional uncertainty

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