Dynamic single-mode semiconductor lasers with a distributed reflector

Suematsu, Y.; Arai, Shigehisa; Kishino, Katsumi

doi:10.1109/jlt.1983.1072072

Cited by 147 publications

(17 citation statements)

References 115 publications

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“…In the third method proposed by Suematsu, Arai, and Kishino 11 and later elaborated on by Brovelli and Keller, 12 the latter use coupled-mode equations and Eq. ͑4͒ to come to an estimate of the effective depth of reflection of an infinitely thick perfect Bragg reflector at normal incidence.…”

Section: ͑5͒mentioning

confidence: 99%

Optimization of multilayer reflectors for extreme ultraviolet lithography

Bal

Singh

Braat

2004

J. Micro/Nanolith. MEMS MOEMS

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Abstract. Multilayer interference coatings on reflective elements in extreme ultraviolet (EUV) projection lithography systems introduce phase and amplitude variations at reflection, which have important implications for imaging properties, e.g., resolution, depth of focus, and tolerances. We discuss the numerical results of the optical effects of multilayers (MLs) and the inclusion of these effects in optical design. This numerical study demonstrates the advantages of spatially varying (graded) MLs compared to multilayers with constant layer thicknesses. We present a new method to calculate the optimum grading of multilayers. Using this new method, we are able to fully optimize the wavefronts emerging from the projection system toward the image plane.

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Section: ͑5͒mentioning

confidence: 99%

Optimization of multilayer reflectors for extreme ultraviolet lithography

Bal

Singh

Braat

2004

J. Micro/Nanolith. MEMS MOEMS

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“…This type of optical switch requires tunable lasers that are capable of not only high-speed wavelength switching but also have a wide tuning range, which realizes a large number of input=output ports. There are several candidates for wavelength tunable lasers such as the distributed feedback (DFB) laser, 19,20) the distributed bragg reflector (DBR) laser, 21) and the ring resonator laser. 22) Although it is mode-hop-free, the DFB laser cannot switch its wavelength in a short time.…”

Section: Introductionmentioning

confidence: 99%

High-speed and long-term wavelength stabilization of tunable distributed amplification distributed feedback laser after laser activation with feedforward and feedback control

Fukuda

Yamaguchi

Kuboki

et al. 2018

Jpn. J. Appl. Phys.

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To manage recent exponentially increasing data traffic, optical-to-optical burst switching and packet switching systems have been attracting much attention because they do not require an optical-to-electrical and an electrical-to-optical conversions. These systems require high-speed optical switches with a large number of input/output ports. As a candidate for the optical switch, we have focused on the combination of wavelength tunable lasers and an arrayed waveguide grating router, and studied the tunable distributed amplification distributed feedback (TDA-DFB) lasers for the optical switch. Previously, our derived feedforward current control achieved high-speed wavelength switching at a single laser in six-arrayed TDA-DFB lasers. For larger-scale optical switching, wavelength switching from a laser to another in an array is required to cover a wide tunable range. In this study, we develop a novel current control model and successfully stabilize the wavelength immediately after laser activation, which would enable high-speed switching between different lasers. Furthermore, we demonstrate the combination of feedforward and feedback controls for high-speed switching with long-term stability.

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“…For optical transmission, a directly modulated laser (DML) is a very promising candidate. The DML can work in a single longitudinal mode under high-speed modulation and temperature or current changes [21] . The first DML at 1.5 μm was reported by Utaka et al in 1981 [22] .…”

mentioning

confidence: 99%