2021
DOI: 10.3390/mi12080893
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Editorial for the Special Issue on Nanofabrication with Focused Electron/Ion Beam Induced Processing

Abstract: Focused electron beam (FEB) and focused ion beam (FIB) technologies have opened novel paths for material science research and technology at the micro and nano scales in recent decades [...]

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Cited by 2 publications
(2 citation statements)
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“…Additive manufacturing and direct-write processes have experienced significant growth in the past decade, where new materials, techniques, and applications have all emerged. Various size scales have been explored historically, but recent pushes have extended three-dimensional additive manufacturing toward the micro- and nano-scale. , While several techniques like direct-ink writing, , multi-photon lithography, , electrohydrodynamic printing, dip-pen lithography, laser induction, and other methods in principle work in the sub-micron regime, focused electron and ion beam-induced deposition (FEBID/FIBID) is likely the most developed technique for synthesizing complex architectures in three dimensions. Several applications have been demonstrated, including nanomechanical resonating sensors, , advanced scanning probe tips, chiral plasmonics, plasmonic split ring resonators, and magnetic architectures …”
Section: Introductionmentioning
confidence: 99%
“…Additive manufacturing and direct-write processes have experienced significant growth in the past decade, where new materials, techniques, and applications have all emerged. Various size scales have been explored historically, but recent pushes have extended three-dimensional additive manufacturing toward the micro- and nano-scale. , While several techniques like direct-ink writing, , multi-photon lithography, , electrohydrodynamic printing, dip-pen lithography, laser induction, and other methods in principle work in the sub-micron regime, focused electron and ion beam-induced deposition (FEBID/FIBID) is likely the most developed technique for synthesizing complex architectures in three dimensions. Several applications have been demonstrated, including nanomechanical resonating sensors, , advanced scanning probe tips, chiral plasmonics, plasmonic split ring resonators, and magnetic architectures …”
Section: Introductionmentioning
confidence: 99%
“…It should be noted that only the use of high-energy ion accelerators made it possible to provide that huge breakthrough in the development of the application and use of various ion-track technologies [4][5][6][7][8][9]. Now that high-energy ion accelerator systems are available, a large number of such fundamentally new experimental studies can be carried out [10][11][12][13][14][15][16][17][18][19][20].…”
Section: Introductionmentioning
confidence: 99%