“…Up to now, CuAlO 2 films have been prepared by various approaches, such as pulsed laser deposition [11,12], chemical vapor deposition [13], sputtering [14][15][16], sol-gel [17], spray pyrolysis [18], and so on. In terms of the film quality and the compatibility with semiconductor technology, RF magnetron sputtering is an ideal technique to grow N-doped CuAlO 2 films.…”