2012
DOI: 10.1016/j.matlet.2012.06.108
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High quality transparent conductive SnO2/Ag/SnO2 tri-layer films deposited at room temperature by magnetron sputtering

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Cited by 57 publications
(14 citation statements)
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“…The results revealed that all the WTO thin films are degenerately doped n –type semiconductors. When deposited at 400°C, the thin film exhibits a resistivity of 3.06 × 10 −3 Ω·cm, The resistivity is much lower than that can be achieved in nominally undoped SnO 2 , indicating that a part of W atoms in the thin film have been in substitutional sites even at low substrate temperature. As the substrate temperature increases to 600°C, the resistivity decreases to the minimum value of 1.75 × 10 −3 Ω·cm.…”
Section: Resultsmentioning
confidence: 87%
“…The results revealed that all the WTO thin films are degenerately doped n –type semiconductors. When deposited at 400°C, the thin film exhibits a resistivity of 3.06 × 10 −3 Ω·cm, The resistivity is much lower than that can be achieved in nominally undoped SnO 2 , indicating that a part of W atoms in the thin film have been in substitutional sites even at low substrate temperature. As the substrate temperature increases to 600°C, the resistivity decreases to the minimum value of 1.75 × 10 −3 Ω·cm.…”
Section: Resultsmentioning
confidence: 87%
“…Metal oxides are another great choice of the nucleation layer for Ag growth. Some poor transparent conductive oxides, e.g., ZnO [ 28 , 29 ], TiO 2 [ 30 , 31 ], SnO x [ 32 , 33 ], Nb 2 O 5 [ 34 ], and so on, have been researched frequently for this purpose. However, their depositions require the magnetic sputtering method or electron/ion-beam assisted techniques, causing possible damage of the organic films.…”
Section: Introductionmentioning
confidence: 99%
“…The oxide/metal/oxide (OMO) multilayer has emerged as a competitive structures alternative to single layers [ 1 , 9 , 10 , 11 , 12 ]. The OMO multilayer has a low sheet resistance and high transparency that are comparable to that of ITO.…”
Section: Introductionmentioning
confidence: 99%